Surface Metrology for Micro and Nanofabrication

Surface Metrology for Micro  and Nanofabrication
Author: Wei Gao
Publsiher: Elsevier
Total Pages: 452
Release: 2020-10-30
Genre: Technology & Engineering
ISBN: 9780128178515

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Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication. Provides materials scientists and engineers with an informed overview of the state-of-the-art in surface metrology Helps readers select and design the optimized surface metrology systems and carry out proper surface metrology practices in the fabrication of micro/nano-devices and components Assesses the best techniques for repairing micro-defects

Handbook of Surface and Nanometrology

Handbook of Surface and Nanometrology
Author: David J. Whitehouse
Publsiher: CRC Press
Total Pages: 982
Release: 2002-12-01
Genre: Science
ISBN: 9781420034196

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The Handbook of Surface and Nanometrology explains and challenges current concepts in nanotechnology. It covers in great detail surface metrology and nanometrology and more importantly the areas where they overlap, thereby providing a quantitative means of controlling and predicting processes and performance. Trends and mechanisms are explained wit

Advanced Machining Processes of Metallic Materials

Advanced Machining Processes of Metallic Materials
Author: Wit Grzesik
Publsiher: Elsevier
Total Pages: 610
Release: 2016-11-15
Genre: Technology & Engineering
ISBN: 9780444637208

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Advanced Machining Processes of Metallic Materials: Theory, Modelling and Applications, Second Edition, explores the metal cutting processes with regard to theory and industrial practice. Structured into three parts, the first section provides information on the fundamentals of machining, while the second and third parts include an overview of the effects of the theoretical and experimental considerations in high-level machining technology and a summary of production outputs related to part quality. In particular, topics discussed include: modern tool materials, mechanical, thermal and tribological aspects of machining, computer simulation of various process phenomena, chip control, monitoring of the cutting state, progressive and hybrid machining operations, as well as practical ways for improving machinability and generation and modeling of surface integrity. This new edition addresses the present state and future development of machining technologies, and includes expanded coverage on machining operations, such as turning, milling, drilling, and broaching, as well as a new chapter on sustainable machining processes. In addition, the book provides a comprehensive description of metal cutting theory and experimental and modeling techniques, along with basic machining processes and their effective use in a wide range of manufacturing applications. The research covered here has contributed to a more generalized vision of machining technology, including not only traditional manufacturing tasks, but also potential (emerging) new applications, such as micro and nanotechnology. Includes new case studies illuminate experimental methods and outputs from different sectors of the manufacturing industry Presents metal cutting processes that would be applicable for various technical, engineering, and scientific levels Includes an updated knowledge of standards, cutting tool materials and tools, new machining technologies, relevant machinability records, optimization techniques, and surface integrity

Measurement Technology for Micro Nanometer Devices

Measurement Technology for Micro Nanometer Devices
Author: Wendong Zhang,Xiujian Chou,Tielin Shi,Zongmin Ma,Haifei Bao,Jingdong Chen,Liguo Chen,Dachao Li,Chenyang Xue
Publsiher: John Wiley & Sons
Total Pages: 352
Release: 2016-10-18
Genre: Technology & Engineering
ISBN: 9781118717998

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A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale • Highlights the advanced research work from industry and academia in micro-nano devices test technology • Written at both introductory and advanced levels, provides the fundamentals and theories • Focuses on the measurement techniques for characterizing MEMS/NEMS devices

Electrochemical Micromachining for Nanofabrication MEMS and Nanotechnology

Electrochemical Micromachining for Nanofabrication  MEMS and Nanotechnology
Author: Bijoy Bhattacharyya
Publsiher: William Andrew
Total Pages: 296
Release: 2015-04-10
Genre: Science
ISBN: 9780323352888

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Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology is the first book solely dedicated to electrochemical micromachining (EMM). It begins with fundamentals, techniques, processes, and conditions, continuing with in-depth discussions of mechanisms of material removal, including an empirical model on the material removal rate for EMM (supported by experimental validation). The book moves next to construction-related features of EMM setup suitable for industrial micromachining applications, varying types of EMM, and the latest developments in the improvement of EMM setup. Further, it covers power supply, roll of electrolyte, and other major factors influencing EMM processes, and reports research findings concerning the improvement of machining accuracy and efficiency. Finally, the book devotes a chapter to the design and development of micro-tools, one of the most vital components in EMM. Covers the generation of micro features used for advanced engineering of materials for fabrication of MEMS, microsystems and other micro-engineering applications Explores the trend of decreasing size of fabricated devices, reflected in coverage of generation of high-precision nano-features on metal and semiconductors utilizing SPM, STM, and AFM, and nanotechnology aspects of EMM Describes nanofabrication utilizing anodic dissolutions for mass manufacturing by overcoming obstacles utilizing electrochemical microsystem technology (EMST) and electrochemical nanotechnology (ENT)

Handbook of Metrology and Applications

Handbook of Metrology and Applications
Author: Dinesh K. Aswal,Sanjay Yadav,Toshiyuki Takatsuji,Prem Rachakonda,Harish Kumar
Publsiher: Springer Nature
Total Pages: 2504
Release: 2023-08-23
Genre: Technology & Engineering
ISBN: 9789819920747

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​This handbook provides comprehensive and up-to-date information on the topic of scientific, industrial and legal metrology. It discusses the state-of-art review of various metrological aspects pertaining to redefinition of SI Units and their implications, applications of time and frequency metrology, certified reference materials, industrial metrology, industry 4.0, metrology in additive manufacturing, digital transformations in metrology, soft metrology and cyber security, optics in metrology, nano-metrology, metrology for advanced communication, environmental metrology, metrology in biomedical engineering, legal metrology and global trade, ionizing radiation metrology, advanced techniques in evaluation of measurement uncertainty, etc. The book has contributed chapters from world’s leading metrologists and experts on the diversified metrological theme. The internationally recognized team of editors adopt a consistent and systematic approach and writing style, including ample cross reference among topics, offering readers a user-friendly knowledgebase greater than the sum of its parts, perfect for frequent consultation. Moreover, the content of this volume is highly interdisciplinary in nature, with insights from not only metrology but also mechanical/material science, optics, physics, chemistry, biomedical and more. This handbook is ideal for academic and professional readers in the traditional and emerging areas of metrology and related fields.

Metrology and Standardization for Nanotechnology

Metrology and Standardization for Nanotechnology
Author: Elisabeth Mansfield,Debra L. Kaiser,Daisuke Fujita,Marcel Van de Voorde
Publsiher: John Wiley & Sons
Total Pages: 626
Release: 2017-04-10
Genre: Technology & Engineering
ISBN: 9783527340392

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For the promotion of global trading and the reduction of potential risks, the role of international standardization of nanotechnologies has become more and more important. This book gives an overview of the current status of nanotechnology including the importance of metrology and characterization at the nanoscale, international standardization of nanotechnology, and industrial innovation of nano-enabled products. First the field of nanometrology, nanomaterial standardization and nanomaterial innovation is introduced. Second, major concepts in analytical measurements are given in order to provide a basis for the reliable and reproducible characterization of nanomaterials. The role of standards organizations are presented and finally, an overview of risk management and the commercial impact of metrology and standardization for industrial innovations.

Characterisation of Areal Surface Texture

Characterisation of Areal Surface Texture
Author: Richard Leach
Publsiher: Springer Science & Business Media
Total Pages: 353
Release: 2013-04-03
Genre: Technology & Engineering
ISBN: 9783642364587

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The function of a component part can be profoundly affected by its surface topography. There are many examples in nature of surfaces that have a well-controlled topography to affect their function. Examples include the hydrophobic effect of the lotus leaf, the reduction of fluid drag due to the riblet structure of shark skin, the directional adhesion of the gecko foot and the angular sensitivity of the multi-faceted fly eye. Surface structuring is also being used extensively in modern manufacturing. In this way many properties can be altered, for example optical, tribological, biological and fluidic. Previously, single line (profile) measurements were adequate to control manufacture of surfaces, but as the need to control the functionality of surfaces increases, there is a growing need for three-dimensional (areal) measurement and characterisation techniques. For this reason there has been considerable research, development and standardisation of areal techniques. This book will present the areal framework that is being adopted by the international community. Whereas previous books have concentrated on the measurement aspects, this book concentrates on the characterisation techniques, i.e. how to interpret the measurement data to give the appropriate (functional) information for a given task. The first part of the book presents the characterisation methods and the second part case studies that highlight the use of areal methods in a broad range of subject areas - from automobile manufacture to archaeology. Contents Introduction to Surface Topography The Areal Field Parameters The Areal Feature Parameters Areal Filtering Methods Areal Form Removal Areal Fractal Methods Choosing the Appropriate Parameter Characterisation of Individual Areal Features Multi-Scale Signature of Surface Topography Correlation of Areal Surface Texture Parameters to Solar Cell Efficiency Characterisation of Cylinder Liner Honing Textures for Production Control Characterisation of the Mechanical Bond Strength for Copper on Glass Plating Applications Inspection of Laser Structured Cams and Conrods Road Surfaces