Advanced Surface Metrology For Micro Nanofabrication

Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication. Provides materials scientists and engineers with an informed overview of the state-of-the-art in surface metrology Helps readers select and design the optimized surface metrology systems and carry out proper surface metrology practices in the fabrication of micro/nano-devices and components Assesses the best techniques for repairing micro-defects

The Handbook of Surface and Nanometrology explains and challenges current concepts in nanotechnology. It covers in great detail surface metrology and nanometrology and more importantly the areas where they overlap, thereby providing a quantitative means of controlling and predicting processes and performance. Trends and mechanisms are explained wit

Addressed to physical and chemical scientists and engineers, this book provides information on the design, manufacture, and assessment of components with critical dimensions or critical tolerances in the 0.1-100 nanometer range. Such tiny parts are now used in automobile engines, cassette players, and other common products. The 16 lectures presented are from an advanced vacation school on instrumentation and nanotechnology in Warwick, England, September 1990. Among the topics are signal processing, ultrasonic sensors, and nanoactuators for controlled displacements. .

Advanced Machining Processes of Metallic Materials: Theory, Modelling and Applications, Second Edition, explores the metal cutting processes with regard to theory and industrial practice. Structured into three parts, the first section provides information on the fundamentals of machining, while the second and third parts include an overview of the effects of the theoretical and experimental considerations in high-level machining technology and a summary of production outputs related to part quality. In particular, topics discussed include: modern tool materials, mechanical, thermal and tribological aspects of machining, computer simulation of various process phenomena, chip control, monitoring of the cutting state, progressive and hybrid machining operations, as well as practical ways for improving machinability and generation and modeling of surface integrity. This new edition addresses the present state and future development of machining technologies, and includes expanded coverage on machining operations, such as turning, milling, drilling, and broaching, as well as a new chapter on sustainable machining processes. In addition, the book provides a comprehensive description of metal cutting theory and experimental and modeling techniques, along with basic machining processes and their effective use in a wide range of manufacturing applications. The research covered here has contributed to a more generalized vision of machining technology, including not only traditional manufacturing tasks, but also potential (emerging) new applications, such as micro and nanotechnology. Includes new case studies illuminate experimental methods and outputs from different sectors of the manufacturing industry Presents metal cutting processes that would be applicable for various technical, engineering, and scientific levels Includes an updated knowledge of standards, cutting tool materials and tools, new machining technologies, relevant machinability records, optimization techniques, and surface integrity

A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale • Highlights the advanced research work from industry and academia in micro-nano devices test technology • Written at both introductory and advanced levels, provides the fundamentals and theories • Focuses on the measurement techniques for characterizing MEMS/NEMS devices

Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology is the first book solely dedicated to electrochemical micromachining (EMM). It begins with fundamentals, techniques, processes, and conditions, continuing with in-depth discussions of mechanisms of material removal, including an empirical model on the material removal rate for EMM (supported by experimental validation). The book moves next to construction-related features of EMM setup suitable for industrial micromachining applications, varying types of EMM, and the latest developments in the improvement of EMM setup. Further, it covers power supply, roll of electrolyte, and other major factors influencing EMM processes, and reports research findings concerning the improvement of machining accuracy and efficiency. Finally, the book devotes a chapter to the design and development of micro-tools, one of the most vital components in EMM. Covers the generation of micro features used for advanced engineering of materials for fabrication of MEMS, microsystems and other micro-engineering applications Explores the trend of decreasing size of fabricated devices, reflected in coverage of generation of high-precision nano-features on metal and semiconductors utilizing SPM, STM, and AFM, and nanotechnology aspects of EMM Describes nanofabrication utilizing anodic dissolutions for mass manufacturing by overcoming obstacles utilizing electrochemical microsystem technology (EMST) and electrochemical nanotechnology (ENT)

​This handbook provides comprehensive and up-to-date information on the topic of scientific, industrial and legal metrology. It discusses the state-of-art review of various metrological aspects pertaining to redefinition of SI Units and their implications, applications of time and frequency metrology, certified reference materials, industrial metrology, industry 4.0, metrology in additive manufacturing, digital transformations in metrology, soft metrology and cyber security, optics in metrology, nano-metrology, metrology for advanced communication, environmental metrology, metrology in biomedical engineering, legal metrology and global trade, ionizing radiation metrology, advanced techniques in evaluation of measurement uncertainty, etc. The book has contributed chapters from world’s leading metrologists and experts on the diversified metrological theme. The internationally recognized team of editors adopt a consistent and systematic approach and writing style, including ample cross reference among topics, offering readers a user-friendly knowledgebase greater than the sum of its parts, perfect for frequent consultation. Moreover, the content of this volume is highly interdisciplinary in nature, with insights from not only metrology but also mechanical/material science, optics, physics, chemistry, biomedical and more. This handbook is ideal for academic and professional readers in the traditional and emerging areas of metrology and related fields.

For the promotion of global trading and the reduction of potential risks, the role of international standardization of nanotechnologies has become more and more important. This book gives an overview of the current status of nanotechnology including the importance of metrology and characterization at the nanoscale, international standardization of nanotechnology, and industrial innovation of nano-enabled products. First the field of nanometrology, nanomaterial standardization and nanomaterial innovation is introduced. Second, major concepts in analytical measurements are given in order to provide a basis for the reliable and reproducible characterization of nanomaterials. The role of standards organizations are presented and finally, an overview of risk management and the commercial impact of metrology and standardization for industrial innovations.