Microsystems

Laser Diode Microsystems provides the reader with the basic knowledge and understanding required for using semiconductor laser diodes in optical microsystems and micro-optical electromechanic systems. This tutorial addresses the fundamentals of semiconductor laser operation and design, coupled with an overview of the types of laser diodes suitable for use in Microsystems, along with their distinguishing characteristics. Emphasis is placed on laser diode characterization and measurement as well as the assembly techniques and optical accessories required for incorporation of semiconductor lasers into complex microsystems. Equipped with typical results and calculation examples, this hand-on text helps readers to develop a feel for how to choose a laser diode, characterize it and incorporate it into a microsystem.

This book introduces the basic tools used in the mechanical design of microsystems, the fabrication methods for these systems, and several applications of this technology. The links between micro- and nanotechnologies are also discussed and light is shed on the potential applications of microsystems to nano-scale manipulation of matter. The book is a systematic, updated and quite complete treatise of its subject.

This book provides a comprehensive treatment of CMOS circuits for passive wireless microsystems. Major topics include: an overview of passive wireless microsystems, design challenges of passive wireless microsystems, fundamental issues of ultra-low power wireless communications, radio-frequency power harvesting, ultra-low power modulators and demodulators, ultra-low power temperature-compensated current and voltage references, clock generation and remote calibration, and advanced design techniques for ultra low-power analog signal processing.

This handbook focuses on the entire development process of biomedical microsystems that promote special interactions with cells. Fundamentals of cell biology and mechanobiology are described as necessary preparatory input for design tasks. Advanced design, simulation, and micro/nanomanufacturing resources, whose combined use enables the development of biomedical microsystems capable of interacting at a cellular level, are covered in depth. A detailed series of chapters is then devoted to applications based on microsystems that offer enhanced cellular control, including microfluidic devices for diagnosis and therapy, cell-based sensors and actuators (smart biodevices), microstructured prostheses for improvement of biocompatibility, microstructured and microtextured cell culture matrices for promotion of cell growth and differentiation, electrophoretic microsystems for study of cell mechanics, microstructured and microtextured biodevices for study of cell adhesion and dynamics, and biomimetic microsystems (including organs-on-chips), among others. Challenges relating to the development of reliable in vitro biomimetic microsystems, the design and manufacture of complex geometries, and biofabrication are also discussed.

This book describes the state of the art in the field of bioanalytical nano- and microsystems with optical functionality. In 12 chapters distinguished scientists and leaders in their respective fields show how various optical technologies have been miniaturized and integrated over the last few decades in order to be combined with nano- and microsystems for applications in the life sciences. The main detection and characterization technologies are introduced, and examples of the superiority of these integrated approaches compared to traditional ones are provided. Examples from e.g. the fields of optical waveguides, integrated interferometers, surface plasmon resonance or Raman spectroscopy are introduced and discussed, and it is shown how these approaches have led to novel functionalities and thereby novel applications.

This volume presents a a selection of the papers presented at the 7th Italian Conference on Sensors and Microsystems, covering challenging topics on strategic areas as automotive, bio-sensors, fundamental chemistry for new generation of material for single molecule recognition.

Where conventional testing and inspection techniques fail at the micro-scale, optical techniques provide a fast, robust, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems is the first comprehensive, up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moiré techniques, interference microscopy, laser Doppler vibrometry, holography, speckle metrology, and spectroscopy. They also examine modern approaches to data acquisition and processing. The book emphasizes the evaluation of various properties to increase reliability and promote a consistent approach to optical testing. Numerous practical examples and illustrations reinforce the concepts. Supplying advanced tools for microsystem manufacturing and characterization, Optical Inspection of Microsystems enables you to reach toward a higher level of quality and reliability in modern micro-scale applications.

Poised to dramatically impact human health, biomedical microsystems (bioMEMS) technologies incorporate various aspects from materials science, biology, chemistry, physics, medicine, and engineering. Reflecting the highly interdisciplinary nature of this area, Biomedical Microsystems covers the fundamentals of miniaturization, biomaterials, microfab