Modeling Innovations In Euv And Nanoimprint Lithography
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Modeling Innovations in EUV and Nanoimprint Lithography
Author | : Yunfei Deng |
Publsiher | : Unknown |
Total Pages | : 326 |
Release | : 2005 |
Genre | : Electronic Book |
ISBN | : UCAL:C3501167 |
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Fast Simulation Methods for Non planar Phase and Multilayer Defects in DUV and EUV Photomasks for Lithography
Author | : Michael Christopher Lam |
Publsiher | : Unknown |
Total Pages | : 436 |
Release | : 2005 |
Genre | : Electronic Book |
ISBN | : UCAL:C3503319 |
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Dissertation Abstracts International
Author | : Anonim |
Publsiher | : Unknown |
Total Pages | : 780 |
Release | : 2006 |
Genre | : Dissertations, Academic |
ISBN | : STANFORD:36105121673144 |
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Modeling Template Distortion During Step and flash Imprint Lithography
Author | : Scott D. Schuetter |
Publsiher | : Unknown |
Total Pages | : 246 |
Release | : 2005 |
Genre | : Electronic Book |
ISBN | : WISC:89088999495 |
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Microfabrication for Industrial Applications
Author | : Regina Luttge |
Publsiher | : William Andrew |
Total Pages | : 314 |
Release | : 2011-09-14 |
Genre | : Science |
ISBN | : 9780815515821 |
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Microfabrication for Industrial Applications focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices. Concerning sub-micron feature manufacture, the book explains: the philosophy of micro/ nanofabrication for integrated circuit industry; thin film deposition; (waveguide, plastic, semiconductor) material processing; packaging; interconnects; stress (e.g., thin film residual); economic; and environmental aspects. Micro/nanomechanical sensors and actuators are explained in depth with information on applications, materials (incl. functional polymers), methods, testing, fabrication, integration, reliability, magnetic microstructures, etc. Shows engineers & students how to evaluate the potential value of current and nearfuture manufacturing processes for miniaturized systems in industrial environments Explains the top-down and bottom up approaches to nanotechnology, nanostructures fabricated with beams, nano imprinting methods, nanoparticle manufacturing (and their health aspects), nanofeature analysis, and connecting nano to micro to macro Discusses issues for practical application cases; possibilities of dimension precision; large volume manufacturing of micro- & nanostructures (machines, materials, costs) Explains applications of Microsystems for information technology, e.g.: data recording (camera, microphone), storage (memories, CDs), communication; computing; and displays (beamers, LCD, TFT) Case studies are given for sensors, resonators, probes, transdermal medical systems, micro- pumps & valves, inkjets, DNA-analysis, lab-on-a-chip, & micro-cooling
Journal of the Physical Society of Japan
Author | : Anonim |
Publsiher | : Unknown |
Total Pages | : 1074 |
Release | : 2004 |
Genre | : Physics |
ISBN | : UOM:39015059092067 |
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Nanofabrication
Author | : Maria Stepanova,Steven Dew |
Publsiher | : Springer Science & Business Media |
Total Pages | : 344 |
Release | : 2011-11-08 |
Genre | : Technology & Engineering |
ISBN | : 9783709104248 |
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Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.
Nanoimprint Lithography
Author | : Hongbo Lan,Yucheng Ding,Hongzhong Liu |
Publsiher | : Nova Science Publishers |
Total Pages | : 0 |
Release | : 2011 |
Genre | : Microlithography |
ISBN | : 1611225019 |
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Lithography, the fundamental fabrication process of semiconductor devices, has been playing a critical role in micro-nanofabrication technologies and manufacturing of Integrated Circuits (IC). Traditional optical lithography including contact and project photolithography has contributed significantly to the semiconductor device advancements. Currently, maintaining the rapid pace of half-pitch reduction requires overcoming the challenge of improving and extending the incumbent optical projection lithography technology while simultaneously developing alternative, next generation lithography (NGL) technologies to be used when optical projection lithography is no longer more economical than the alternatives. Furthermore, NIL is also one of the most promising low-cost, high-throughput technologies for manufacturing nanostructures as this highly technical book will give new insight to.