Nonequilibrium Processes In Partially Ionized Gases

The NATO . Advanced Research Insti tute on Nonequilibrium Processes in Partially Ionized Gases was held at Acquafredda di Maratea during 4-17 June 1989. The Institute considered the interconnections between scattering and transport theories and modeling of nonequilibrium systems generated by electrical discharges, emphasizing the importance of microscopic processes in affecting the bulk properties of plasmas. The book tries to reproduce these lines. In particular several contributions describe scattering cross sections involving electrons interacting with atoms and molecules in both ground and excited states (from theoretical and experimental point of view), of energy transfer processes as well as reactive ones involving excited molecules colliding with atoms and molecules as well as with metallic surfaces. Other contributions deal with the basis of transport theories (Boltzmann and Monte Carlo methods) for describing the bulk properties of non equilibrium plasmas as well as with the modeling of complicated systems emphasizing in particular the strong coupling between the Boltzmann equation and excited state kinetics. Finally the book contains several contributions describing applications in different fields such as Excimer Lasers, Negative Ion Production, RF Discharges, Plasma Chemistry, Atmospheric Processes and Physics of Lamps. The Organizing Committee gratefully acknowledges the generous financial support provided by the NATO Science Committee as well as by Azienda Autonoma di Soggiorno e Turismo of Maratea, by University of Bari, by C. N. R. (Centro di Studio per la Chimica dei Plasmi and Comitato per la Chimica), by ENEA, by Lawrence Livermore Laboratory and by US Army Research Office.

This volume presents the contributions of the participants in the Sixth International Swarm Seminar, held August 2-5, 1989, at the Webb Institute in Glen Cove, New York. The Swarm Seminars are traditionally held as relatively small satellite conferences of the International Conference on the Physics of Electronic and Atomic Collisions (ICPEAC) which occurs every two years. The 1989 ICPEAC took place in New York City prior to the Swarm Seminar. The focus of the Swarm Seminars has been on basic research relevant to understanding the transport of charged particles, mainly electrons and ions, in weakly ionized gases. This is a field that tends to bridge the gap between studies of fundamental binary atomic and molecular collision processes and studies of electrical breakdown or discharge phenomena in gases. Topics included in the 1989 seminar ranged the gamut from direct determinations of charged-particle collision cross sections to use of cross sections and swarm parameters to model the behavior of electrical gas discharges. Although the range of subjects covered was in many respects similar to that of previous seminars, there was an emphasis on certain selected themes that tended to give this seminar a distinctly different flavor. There was, for example, considerable discussion on the meaning of "equilibrium" and the conditions under which nonequilibrium effects become important in the transport of electrons through a gas.

This well-illustrated resource provides vital cross-section information for the atomic and molecular collision processes taking place in the boundary region of magnetically confined fusion plasmas and in other laboratory and astrophysical low-temperature plasmas. The expertly assessed information in this noteworthy volume includes the most recent experimental and theoretical results presented in a convenient format. Coverage includes the processes of electron-impact excitation and ionization of plasma edge atoms, electron-ion recombination, dissociative collision processes involving electrons and much more.

The present book contains the proceedings of the workshop "Plasma Technology and Applications" which was held at 11 Ciocco (Lucca-Italy) during 5-6 July 1991. The workshop was organized just before ICPIG XX to emphasize the role of plasma physics and plasma chemistry in different fields of technology. Topics cover different applications such as lamps, plasma treatment of materials (etching, deposition, nitriding), plasma sources (microwave excitation, negative ion sources) and plasma destruction of pollutants. Several chapters deal with basic concepts in plasma physics, non equilibrium plasma modeling and plasma diagnostics as well as with laser interaction with solid targets. The authors gratefully acknowledge the financial support provided by university of Bari (Italy) and by CNR (Centro di Studio per la Chimica dei Plasmi, Istituto di Fisica Atomica e Molecolare (IFAM) and Progetto Finalizzato Materiali Speciali per Tecnologie Avanzate) as well as the sponsorship of ENEA. M. Capitelli C. Gorse v CONTENTS Plasmas in nature, laboratory and technology 1 A.M. Ignatov and A.A. Rukhadze Laser diagnostics of plasmas 11 L. Pyatnitsky Probe diagnostics of plasmas 27 G. Dilecce Theory, properties and applications of non equilibrium plasmas created by external energy sources 45 E. Son Non-Equilibrium plasma modeling 59 M. Capitel1i, R. Celiberto, G. Capriati, C. Gorse and S. Longo Gas discharge lamps 81 M. Koedam Plasma etching processes and diagnostics 93 R. d'Agostino and F. Fracassi Plasma deposition: processes and diagnostics 109 A

Proceedings of a NATO ARW held in Vimeiro, Portugal, May 11-15, 1992

The latest volume in the highly acclaimed series addresses atomic collisions, assessing the status of the current knowledge, identifying deficiencies, and exploring ways to improve the quality of cross-section data.Eleven articles, written by foremost experts, focus on cross-section determination by experiment or theory, on needs in selected applications, and on efforts toward the compilation and dissemination of data. This is the first volume edited under the additional direction of Herbert Walther. Presents absolute cross sections for atomic collisions Uses benchmark measurements and benchmark calculations Discusses needs for cross-section data in applications Contains a guide to data resources, bibliographies, and compendia

Atmospheric-pressure plasmas continue to attract considerable research interest due to their diverse applications, including high power lasers, opening switches, novel plasma processing applications and sputtering, EM absorbers and reflectors, remediation of gaseous pollutants, excimer lamps, and other noncoherent light sources. Atmospheric-pressure plasmas in air are of particular importance as they can be generated and maintained without vacuum enclosure and without any additional feed gases. Non-Equilibrium Air Plasmas at Atmospheric Pressure reviews recent advances and applications in the generation and maintenance of atmospheric-pressure plasmas. With contributions from leading international researchers, the coverage includes advances in atmospheric-pressure plasma source development, diagnostics and characterization, air plasma chemistry, modeling and computational techniques, and an assessment of the status and prospects of atmospheric-pressure air plasma applications. The extensive application sections make this book attractive for practitioners in many fields where technologies based on atmospheric-pressure air plasmas are emerging.