Optimal Synthesis Methods For Mems

The field of "microelectromechanical systems," or "MEMS," has gradually evolved from a "discipline" populated by a small group of researchers to an "enabling technology" supporting a variety of products in such diverse areas as mechanical and inertial sensors, optical projection displays, telecommunications equipment, and biology and medicine. Critical to the success of these products is the ability to design them, and this invariably involves detailed modeling of proposed designs. Over the past twenty years, such modeling has become increasingly sophisticated, with full suites of MEMS-oriented computer-aided-design tools now available worldwide. But there is another equally important side to the design process In my own book, Microsystem figuring out what to build in the first place. Design, I chose to emphasize the modeling aspect of design. The task of figuring out what to build was defined by a vague step called "creative thinking." I used practical product examples to illustrate the many subtle characteristics of successful designs, but I made no attempt to systematize the generation ofdesign proposals or optimized designs. That systemization is called "synthesis," which is the subjectofthis book.

The field of "microelectromechanical systems," or "MEMS," has gradually evolved from a "discipline" populated by a small group of researchers to an "enabling technology" supporting a variety of products in such diverse areas as mechanical and inertial sensors, optical projection displays, telecommunications equipment, and biology and medicine. Critical to the success of these products is the ability to design them, and this invariably involves detailed modeling of proposed designs. Over the past twenty years, such modeling has become increasingly sophisticated, with full suites of MEMS-oriented computer-aided-design tools now available worldwide. But there is another equally important side to the design process In my own book, Microsystem figuring out what to build in the first place. Design, I chose to emphasize the modeling aspect of design. The task of figuring out what to build was defined by a vague step called "creative thinking." I used practical product examples to illustrate the many subtle characteristics of successful designs, but I made no attempt to systematize the generation ofdesign proposals or optimized designs. That systemization is called "synthesis," which is the subjectofthis book.

This volume takes a much needed multiphysical approach to the numerical and experimental evaluation of the mechanical properties of MEMS and NEMS. The contributed chapters present many of the most recent developments in fields ranging from microfluids and damping to structural analysis, topology optimization and nanoscale simulations. The book responds to a growing need emerging in academia and industry to merge different areas of expertise towards a unified design and analysis of MEMS and NEMS. Contents:Challenges in Modeling Liquid and Gas Flows in Micro/Nano Devices (M Gad-el-Hak)Using the Kinetic Equations for MEMS and NEMS (C Cercignani et al.)Applying the Direct Simulation Monte Carlo (DSMC) Method to Gas-Filled MEMS Devices (M A Gallis)New Approaches for the Simulation of Microfluidics in MEMS (T Y Ng et al.)Evaluating Gas Damping in MEMS Using Fast Integral Equation Solvers (A Frangi et al.)Experimental Techniques for Damping Characterization of Micro and Nanostructures (A Bosseboeuf & H Mathias)Nonlinear Dynamics of Electrostatically Actuated MEMS (S K De & N Aluru)Coupled Deformation Analysis of Thin MEMS Plates (S Mukherjee & S Telukunta)Pull-In Instability in Electrostatically Actuated MEMS Due to Coulomb and Casimir Forces (R C Batra et al.)Numerical Simulation of BioMEMS with Dielectrophoresis (G R Liu & C X Song)Continuous Modeling of Multi-Physics Problems of Microsystems for Topology Optimization (G K Ananthasuresh)Mechanical Characterization of Polysilicon at the Micro-Scale Through On-Chip Tests (A Corigliano et al.)Nano-Scale Testing of Nanowires and Carbon Nanotubes Using a Micro-Electro-Mechanical System (H D Espinosa et al.) Readership: Postgraduate students, researchers and scientists in academia and the MEMS/NEMS industry. Keywords:MEMS;NEMS;Microfluidics;Electrostatics;Pull-In Instability;BIOMEMS;Optimization;Coupled AnalysesKey Features:Reinforces links between the most advanced applications from academia and industry by presenting several applications to real MEMSIncludes several chapters on the experimental testing of MEMS and NEMS to evaluate their dynamical behavior and material properties and validate the numerical procedures describedDraws together contributions from leading experts worldwideTakes a new approach to the subject by focusing on the multiphysical nature of the problemsReviews:“This book would be of interest to those in academic or industrial research that model MEMS devices. The book will provide some of the latest methods used to model these devices along with some experimental methods used to characterize MEMS.”IEEE Electrical Insulation Magazine

The objective of this book is to provide those interested in the field of flexible robotics with an overview of several scientific and technological advances in the practical field of robotic manipulation. The different chapters examine various stages that involve a number of robotic devices, particularly those designed for manipulation tasks characterized by mechanical flexibility. Chapter 1 deals with the general context surrounding the design of functionally integrated microgripping systems. Chapter 2 focuses on the dual notations of modal commandability and observability, which play a significant role in the control authority of vibratory modes that are significant for control issues. Chapter 3 presents different modeling tools that allow the simultaneous use of energy and system structuring notations. Chapter 4 discusses two sensorless methods that could be used for manipulation in confined or congested environments. Chapter 5 analyzes several appropriate approaches for responding to the specific needs required by versatile prehension tasks and dexterous manipulation. After a classification of compliant tactile sensors focusing on dexterous manipulation, Chapter 6 discusses the development of a complying triaxial force sensor based on piezoresistive technology. Chapter 7 deals with the constraints imposed by submicrometric precision in robotic manipulation. Chapter 8 presents the essential stages of the modeling, identification and analysis of control laws in the context of serial manipulator robots with flexible articulations. Chapter 9 provides an overview of models for deformable body manipulators. Finally, Chapter 10 presents a set of contributions that have been made with regard to the development of methodologies for identification and control of flexible manipulators based on experimental data. Contents 1. Design of Integrated Flexible Structures for Micromanipulation, Mathieu Grossard, Mehdi Boukallel, Stéphane Régnier and Nicolas Chaillet. 2. Flexible Structures’ Representation and Notable Properties in Control, Mathieu Grossard, Arnaud Hubert, Stéphane Régnier and Nicolas Chaillet. 3. Structured Energy Approach for the Modeling of Flexible Structures, Nandish R. Calchand, Arnaud Hubert, Yann Le Gorrec and Hector Ramirez Estay. 4. Open-Loop Control Approaches to Compliant Micromanipulators, Yassine Haddab, Vincent Chalvet and Micky Rakotondrabe. 5. Mechanical Flexibility and the Design of Versatile and Dexterous Grippers, Javier Martin Amezaga and Mathieu Grossard. 6. Flexible Tactile Sensors for Multidigital Dexterous In-hand Manipulation, Mehdi Boukallel, Hanna Yousef, Christelle Godin and Caroline Coutier. 7. Flexures for High-Precision Manipulation Robots, Reymond Clavel, Simon Henein and Murielle Richard. 8. Modeling and Motion Control of Serial Robots with Flexible Joints, Maria Makarov and Mathieu Grossard. 9. Dynamic Modeling of Deformable Manipulators, Frédéric Boyer and Ayman Belkhiri. 10. Robust Control of Robotic Manipulators with Structural Flexibilities, Houssem Halalchi, Loïc Cuvillon, Guillaume Mercère and Edouard Laroche. About the Authors Mathieu Grossard, CEA LIST, Gif-sur-Yvette, France. Nicolas Chaillet, FEMTO-ST, Besançon, France. Stéphane Régnier, ISIR, UPMC, Paris, France.

This book presents the most important aspects of analysis of dynamical processes taking place on the human body surface. It provides an overview of the major devices that act as a prevention measure to boost a person‘s motivation for physical activity. A short overview of the most popular MEMS sensors for biomedical applications is given. The development and validation of a multi-level computational model that combines mathematical models of an accelerometer and reduced human body surface tissue is presented. Subsequently, results of finite element analysis are used together with experimental data to evaluate rheological properties of not only human skin but skeletal joints as well. Methodology of development of MOEMS displacement-pressure sensor and adaptation for real-time biological information monitoring, namely “ex vivo” and “in vitro” blood pulse type analysis, is described. Fundamental and conciliatory investigations, achieved knowledge and scientific experience about biologically adaptive multifunctional nanocomposite materials, their properties and synthesis compatibility, periodical microstructures, which may be used in various optical components for modern, productive sensors‘ formation technologies and their application in medicine, pharmacy industries and environmental monitoring, are presented and analyzed. This book also is aimed at research and development of vibrational energy harvester, which would convert ambient kinetic energy into electrical energy by means of the impact-type piezoelectric transducer. The book proposes possible prototypes of devices for non-invasive real-time artery pulse measurements and micro energy harvesting.

Many aspects of Nature, Biology or even from Society have become part of the techniques and algorithms used in computer science or they have been used to enhance or hybridize several techniques through the inclusion of advanced evolution, cooperation or biologically based additions. The previous NICSO workshops were held in Granada, Spain, 2006, Acireale, Italy, 2007, and in Tenerife, Spain, 2008. As in the previous editions, NICSO 2010, held in Granada, Spain, was conceived as a forum for the latest ideas and the state of the art research related to nature inspired cooperative strategies. The contributions collected in this book cover topics including nature-inspired techniques like Genetic Algorithms, Evolutionary Algorithms, Ant and Bee Colonies, Swarm Intelligence approaches, Neural Networks, several Cooperation Models, Structures and Strategies, Agents Models, Social Interactions, as well as new algorithms based on the behaviour of fireflies or bats.

This book contains selected papers from the symposium on Engineering Pedagogy organised in honour of Professor Amitabha Ghosh and his Lecture Series on Evolution of Classical Mechanics. It covers evolution of mechanics from ancient times to modern days and good pedagogical practices among engineering and science faculty. The content includes chapters on challenges in engineering education, intellectual property rights, professional ethics, manufacturing education, additive manufacturing in engineering curricula, among others. The volume necessitates an efficient and effective pedagogical approach from engineering educators. This book will be of interest to those in teaching across all disciplines of engineering.

Here is a textbook for senior undergraduate and graduate level students that offers a novel and systematic look into the dynamics of MEMS. It includes numerous solved examples together with the proposed problems. The material to be found here will also be of interest to researchers with a non-mechanical background. The book focuses on the mechanical domain, specifically the dynamic sub-domain, and provides an in-depth treatment of problems that involve reliable modeling, analysis and design.