Semiconductor Silicon
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Semiconductor Silicon Crystal Technology
Author | : Fumio Shimura |
Publsiher | : Elsevier |
Total Pages | : 435 |
Release | : 2012-12-02 |
Genre | : Technology & Engineering |
ISBN | : 9780323150484 |
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Semiconductor Silicon Crystal Technology provides information pertinent to silicon, which is the dominant material in the semiconductor industry. This book discusses the technology of integrated circuits (ICs) in electronic materials manufacturer. Comprised of eight chapters, this book provides an overview of the basic science, silicon materials, IC device fabrication processes, and their interaction for enhancing both the processes and materials. This text then proceeds with a discussion of the atomic structure and bonding mechanisms in order to understand the nature and formation of crystal structures, which are the fundamentals of material science. Other chapters consider the technological crystallography and classify natural crystal morphologies based on observation. The final chapter deals with the interrelationships among silicon material characteristics, circuit design, and IC fabrication in order to ensure the fabrication of very-large-scale-integration/ultra-large-scale-integration circuits. This book is a valuable resource for graduate students, physicists, engineers, materials scientists, and professionals involved in semiconductor industry.
Semiconductor Silicon 2002
Author | : Howard R. Huff,László Fábry,Seigo Kishino |
Publsiher | : The Electrochemical Society |
Total Pages | : 650 |
Release | : 2002 |
Genre | : Semiconductors |
ISBN | : 1566773741 |
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Semiconductor Silicon 1977
Author | : Howard R. Huff,Erhard Sirtl |
Publsiher | : Unknown |
Total Pages | : 1170 |
Release | : 1977 |
Genre | : Semiconductors |
ISBN | : CORNELL:31924004734145 |
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Semiconductor Silicon
Author | : Edward L. Kern |
Publsiher | : Unknown |
Total Pages | : 788 |
Release | : 1969 |
Genre | : Semiconductors |
ISBN | : CORNELL:31924003908534 |
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Handbook of Silicon Semiconductor Metrology
Author | : Alain C. Diebold |
Publsiher | : CRC Press |
Total Pages | : 703 |
Release | : 2001-06-29 |
Genre | : Technology & Engineering |
ISBN | : 9780203904541 |
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Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay
Handbook of Semiconductor Silicon Technology
Author | : William C. O'Mara,Robert B. Herring,Lee Philip Hunt |
Publsiher | : William Andrew |
Total Pages | : 826 |
Release | : 1990-12-31 |
Genre | : Science |
ISBN | : UOM:39015018468192 |
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A summary of the science, technology, and manufacturing of semiconductor silicon materials. Properties of silicon are detailed, and a set of silicon binary phase diagrams is included. Other aspects such as materials handling, safety, impurity, and defect reduction are also discussed.
Handbook of Semiconductor Manufacturing Technology
Author | : Yoshio Nishi,Robert Doering |
Publsiher | : CRC Press |
Total Pages | : 3276 |
Release | : 2017-12-19 |
Genre | : Technology & Engineering |
ISBN | : 9781351829823 |
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Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semiconductor Manufacturing Technology, Second Edition features new and updated material that keeps it at the vanguard of today's most dynamic and rapidly growing field. Iconic experts Robert Doering and Yoshio Nishi have again assembled a team of the world's leading specialists in every area of semiconductor manufacturing to provide the most reliable, authoritative, and industry-leading information available. Stay Current with the Latest Technologies In addition to updates to nearly every existing chapter, this edition features five entirely new contributions on... Silicon-on-insulator (SOI) materials and devices Supercritical CO2 in semiconductor cleaning Low-κ dielectrics Atomic-layer deposition Damascene copper electroplating Effects of terrestrial radiation on integrated circuits (ICs) Reflecting rapid progress in many areas, several chapters were heavily revised and updated, and in some cases, rewritten to reflect rapid advances in such areas as interconnect technologies, gate dielectrics, photomask fabrication, IC packaging, and 300 mm wafer fabrication. While no book can be up-to-the-minute with the advances in the semiconductor field, the Handbook of Semiconductor Manufacturing Technology keeps the most important data, methods, tools, and techniques close at hand.
Semiconductor Fabrication
Author | : Dinesh C. Gupta |
Publsiher | : ASTM International |
Total Pages | : 472 |
Release | : 1989 |
Genre | : Metallizing |
ISBN | : 9780803112735 |
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