Sensors Mechanical Sensors

Here's the book to keep handy when you have to overcome obstacles in design, simulation, fabrication and application of MEMS sensors. This practical guide to design tools and packaging helps you create the sensors you need for the full range of mechanical microsensor applications. Critical physical sensing techniques covered include piezoresistive, piezoelectric, capacative, optical, resonant, actuation, thermal, and magnetic, as well as smart sensing.

Sensors are all around us. They are in phones, cars, planes, trains, robots, mils, lathes, packaging lines, chemical plants, power plants, etc. Modern technology could not exist without sensors. The sensors measure what we need to know and the control system then performs the desired actions. When an engineer builds any machine he or she needs to have basic understanding about sensors. Correct sensors need to be selected for the design right from the start. The designer needs to think about the ranges, required accuracy, sensor cost, wiring, correct installation and placement etc. Without the basic knowledge of sensors fundamental no machine can be built successfully today. The objective of this book is to provide the basic knowledge to electrical and mechanical engineers, engineering students and hobbyist from the field of sensors to help them with the selection of “proper” sensors for their designs. No background knowledge in electrical engineering is required, all the necessary basics are provided. The book explains how a sensor works, in what ranges it can be used, with what accuracy etc. It also provides examples of industrial application for selected sensors. The book covers all the major variables in mechanical engineering such as temperature, force, torque, pressure, humidity, position, speed, acceleration etc. The approach is always as follows: - Explain how the sensor works, what is the principle - Explain in what ranges and with what accuracy it can work - Describe its properties with charts, eventually equations - Give examples of such sensors including application examples

This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and developed and taught by the authors. Support by FSRM is herewith gratefully acknowledged. This book attempts to serve two purposes. First it gives an overview on me chanical microsensors (sensors for pressure, force, acceleration, angular rate and fluid flow, realized by silicon micromachining). Second, it serves as a textbook for engineers to give them a comprehensive introduction on the basic design issues of these sensors. Engineers active in sensor design are usually educated either in electrical engineering or mechanical engineering. These classical educa tional pro grams do not prepare the engineer for the challenging task of sensor design since sensors are instruments typically bridging the disciplines: one needs a rather deep understanding of both mechanics and electronics. Accordingly, the book contains discussion of the basic engineering sciences relevant to mechanical sensors, hopefully in a way that it is accessible for all colours of engineers. Engi rd th neering students in their 3 or 4 year should have enough knowledge to be able to follow the arguments presented in this book. In this sense, this book should be useful as textbook for students in courses on mechanical microsensors (as is CUf rently being done at the University ofTwente).

'Sensors' is the first self-contained series to deal with the wholearea of sensors. It describes general aspects, technical andphysical fundamentals, construction, function, applications anddevelopments of the various types of sensors. This volume contains the physical and technical fundamentals ofmechanical sensors, and contains and assesses the various types ofsensors for particular applications. Of interest to engineers,physicists, chemists and others involved in sensor technology.

Unlike other treatments of sensors or actuators, this book approaches the devices from the point of view of the fundamental coupling mechanism between the electrical and mechanical behaviour. The principles of operation of the solenoid are the same in both cases, and this book thus treats them together. It begins with a discussion of systems analysis as a tool for modelling transducers, before turning to a detailed discussion of transduction mechanisms. The whole is rounded off by an input/output analysis of transducers.

Light on physics and math, with a heavy focus on practical applications, Optical, Acoustic, Magnetic, and Mechanical Sensor Technologies discusses the developments necessary to realize the growth of truly integrated sensors for use in physical, biological, optical, and chemical sensing, as well as future micro- and nanotechnologies. Used to pick up sound, movement, and optical or magnetic signals, portable and lightweight sensors are perpetually in demand in consumer electronics, biomedical engineering, military applications, and a wide range of other sectors. However, despite extensive existing developments in computing and communications for integrated microsystems, we are only just now seeing real transformational changes in sensors, which are critical to conducting so many advanced, integrated tasks. This book is designed in two sections—Optical and Acoustic Sensors and Magnetic and Mechanical Sensors—that address the latest developments in sensors. The first part covers: Optical and acoustic sensors, particularly those based on polymer optical fibers Potential of integrated optical biosensors and silicon photonics Luminescent thermometry and solar cell analyses Description of research from United States Army Research Laboratory on sensing applications using photoacoustic spectroscopy Advances in the design of underwater acoustic modems The second discusses: Magnetic and mechanical sensors, starting with coverage of magnetic field scanning Some contributors’ personal accomplishments in combining MEMS and CMOS technologies for artificial microsystems used to sense airflow, temperature, and humidity MEMS-based micro hot-plate devices Vibration energy harvesting with piezoelectric MEMS Self-powered wireless sensing As sensors inevitably become omnipresent elements in most aspects of everyday life, this book assesses their massive potential in the development of interfacing applications for various areas of product design and sciences—including electronics, photonics, mechanics, chemistry, and biology, to name just a few.

Light on physics and math, with a heavy focus on practical applications, Optical, Acoustic, Magnetic, and Mechanical Sensor Technologies discusses the developments necessary to realize the growth of truly integrated sensors for use in physical, biological, optical, and chemical sensing, as well as future micro- and nanotechnologies. Used to pick up sound, movement, and optical or magnetic signals, portable and lightweight sensors are perpetually in demand in consumer electronics, biomedical engineering, military applications, and a wide range of other sectors. However, despite extensive existing developments in computing and communications for integrated microsystems, we are only just now seeing real transformational changes in sensors, which are critical to conducting so many advanced, integrated tasks. This book is designed in two sections—Optical and Acoustic Sensors and Magnetic and Mechanical Sensors—that address the latest developments in sensors. The first part covers: Optical and acoustic sensors, particularly those based on polymer optical fibers Potential of integrated optical biosensors and silicon photonics Luminescent thermometry and solar cell analyses Description of research from United States Army Research Laboratory on sensing applications using photoacoustic spectroscopy Advances in the design of underwater acoustic modems The second discusses: Magnetic and mechanical sensors, starting with coverage of magnetic field scanning Some contributors’ personal accomplishments in combining MEMS and CMOS technologies for artificial microsystems used to sense airflow, temperature, and humidity MEMS-based micro hot-plate devices Vibration energy harvesting with piezoelectric MEMS Self-powered wireless sensing As sensors inevitably become omnipresent elements in most aspects of everyday life, this book assesses their massive potential in the development of interfacing applications for various areas of product design and sciences—including electronics, photonics, mechanics, chemistry, and biology, to name just a few.

This title offers an overview of various sensors and sensor systems as required and applied in mechatronics. Emphasis lies on the physical background of the operating principles, illustrated with examples of commercially available sensors and of recent and future developments.