Fabrication And Design Of Resonant Microdevices

This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices – important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues of damping and noise for resonant MEMS; electronic interfacing; packaging issues; and numerous examples of resonant MEMS from academia and industry. Offers numerous academic and industrial examples of resonant MEMS Provides an analytic model of device behaviour Explains two-port systems in detail Devotes ample space to excitation and signal detection methods Covers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices

This book discusses the main issues on fabrication, design, and applications of micromachined resonant devices as well as techniques that are commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). After a brief introduction to the concepts of resonance, an overview of the fabrication techniques for micromachined devices will be given. This section is a necessary part of the book as the options during the design of a resonant device strongly depend on how the device is going to be fabricated. Resonant devices are generally two port systems: an input port to excite the structure and cause the resonance and an output port to monitor the behavior of the device. The next two chapters of the book are dedicated to excitation and signal detection methods. An analytic model of the device behavior is one of the most valuable design tools. A chapter is dedicated to this important issue followed by numerical simulation techniques. The book also covers the issues of damping and noise for resonant MEMS. These two topics are of particular importance for high-Q devices. Electronic interfacing and packaging issues are also discussed in separate chapters. The book concludes by giving numerous examples of resonant MEMS from the academia and industry with a brief analysis of them using the material that was presented in the earlier chapters. * Offers numerous academic and industrial examples of resonant MEMS * Provides an analytic model of device behavior * Explains two-port systems in detail * Devotes ample space to excitation and signal detection methods * Covers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices

As rapid technological developments occur in electronics, photonics, mechanics, chemistry, and biology, the demand for portable, lightweight integrated microsystems is relentless. These devices are getting exponentially smaller, increasingly used in everything from video games, hearing aids, and pacemakers to more intricate biomedical engineering and military applications. Edited by Kris Iniewski, a revolutionary in the field of advanced semiconductor materials, Integrated Microsystems: Electronics, Photonics, and Biotechnology focuses on techniques for optimized design and fabrication of these intelligent miniaturized devices and systems. Composed of contributions from experts in academia and industry around the world, this reference covers processes compatible with CMOS integrated circuits, which combine computation, communications, sensing, and actuation capabilities. Light on math and physics, with a greater emphasis on microsystem design and configuration and electrical engineering, this book is organized in three sections—Microelectronics and Biosystems, Photonics and Imaging, and Biotechnology and MEMs. It addresses key topics, including physical and chemical sensing, imaging, smart actuation, and data fusion and management. Using tables, figures, and equations to help illustrate concepts, contributors examine and explain the potential of emerging applications for areas including biology, nanotechnology, micro-electromechanical systems (MEMS), microfluidics, and photonics.

This book provides an introductory overview of the research done in recent years in the area of magnetic sensors. The topics presented in this book range from fundamental theories and properties of magnets and their sensing applications in areas such as biomedicine, microelectromechanical systems, nano-satellites and pedestrian tracking. Written for the readers who wished to obtain a basic understanding of the research area as well as to explore other potential areas of applications for magnetic sensors, this book presents exciting developments in the field in a highly readable manner.

Nanotechnology is a technology on the verge of commercialization. In this important work, an unrivalled team of international experts provides an exploration of the emerging nanotechnologies that are poised to make the nano-revolution a reality in the manufacturing sector. From their different perspectives, the contributors explore how developments in nanotechnology are transforming areas as diverse as medicine, advanced materials, energy, electronics and agriculture. Key topics covered include: Characterization of nanostructures Bionanotechnology Nanoelectronics Micro- and nanomachining Self-assembly techniques New applications of carbon nanotubes Environmental and health impacts This book provides an important and in-depth guide to the applications and impact of nanotechnology to different manufacturing sectors. As such, it will find a broad readership, from R&D scientists and engineers to venture capitalists. About the Authors Waqar Ahmed is Chair of Nanotechnology & Advanced Manufacturing and the Director of the Institute of Advanced Manufacturing and Innovation at the University of Central Lancashire, UK. He has contributed to the wider industrial adoption of surface coating solutions through fundamental research and modeling of gas phase processes in CVD and studies of tribological behavior. Mark J. Jackson is a Professor at the Birck Nanotechnology Center and Center for Advanced Manufacturing, College of Technology at Purdue University. Dr Jackson is active in research work concerned with understanding the properties of materials in the field of microscale metal cutting, micro- and nanoabrasive machining, and laser micromachining. He is also involved in developing next generation manufacturing processes and biomedical engineering. • Explains how to use biological pathways to produce nanoelectric devices • Presents data on new, experimental designs • Discusses the history of carbon nanotubes and how they are synthesized to fabricate novel nanostructures (incl. data on laser ablation) • Extensive use of illustrations, tables, and figures throughout

Combining the materials science, technological, and device aspects of organic bioelectronics based on green materials, this is the first overview of the emerging concepts involving fabrication techniques for sustainable electronics with low energy and material consumption. With contributions from top-notch editors and authors, in one focus, the book covers a collection of natural materials suited for electronics applications such as paper, silk, melanin, DNA and nucleobases, resins, gums, saccharides, cellulose, gelatine and peptides. In another thrust, the book focuses on device fabrication based on these materials, including processing aspects, and applications such as sensors, signal transducers, transient, implantable and digestible electronics. With its interdisciplinary approach this text will appeal to the chemistry, physics, materials science, and engineering communities.

The World Health Organization in 2004 estimated approximately 1.1 billion people did not have access to clean water and that 35% of Third World residents died from water-borne illnesses. While the situation is grim, recent advances strongly indicate that many of the current water quality problems can be addresses – and potentially resolved – using nanotechnology. Nanotechnology is already having a dramatic impact on research in water quality and Nanotechnology Applications for Clean Water highlights both the challenges and the opportunities for nanotechnology to positively influence this area of environmental protection. Here you will find detailed information on breakthroughs, cutting edge technologies, current research, and future trends that may affect acceptance of widespread applications. The first four parts of the book cover specific topics including using nanotechnology for clean drinking water in both large scale water treatment plants and in point-of-use systems. For instance, recent advances show that many of the current problems involving water quality can be addressed using nanosorbents, nanocatalysts, bioactive nanoparticles, nanostructured catalytic membranes, and nanoparticle enhanced filtration. The book also discusses existing technologies and future potential for groundwater remediation, pollution prevention, and sensors. The final part discusses the inherent societal implications that may affect acceptance of widespread applications. Over 80 leading experts from around the world share their wealth of knowledge in this truly unique reference. Institutions such as Center for the Purification of Water and Systems (Univ. of Illinois at Urbana-Champaign); UCLA Water Technology Center; Carnegie Mellon University, University of Kentucky; The University of Western Ontario; Pacific Northwest National Laboratory; National Institute for Advanced Industrial Science and Technology (Japan), Munasinghe Institute for Development (Sri Lanka) and the Woodrow Wilson Center for Scholars are just a few of the knowledge centers represented in this book. Water quality is a serious, global issue in which government bodies and scientific communities face many challenges in ensuring clean water is available to everyone. Nanotechnology is already showing dramatic results, and this book is an attempt to share current technologies and future possibilities in reaching this goal. From the Foreword: "Researchers and practitioners may find in this volume, key challenges regarding clean water resources. The presentations may crystallize new research and education programs." - Mihail Roco, U.S. National Science Foundation and U.S. Nanotechnology Initiative • Contributors from the US, India, Canada, Japan, UK, Sri Lanka, and South Africa • Provides detailed information on breakthroughs, cutting edge technologies, current research, and future trends that may affect acceptance of widespread applications • Covers specific topics including using nanotechnology for clean drinking water in both large scale water treatment plants and in point-of-use systems. • Discusses existing technologies and future potential for groundwater remediation, pollution prevention, and sensors • Highlights both the challenges and the opportunities for nanotechnology to positively influence this area of environmental protection.

This book documents the tremendous progress in the use of nanotechnology for a range of bioapplications with the aim of providing students, researchers, technicians, and other professionals with an up-to-date overview of the field. After a general introduction to the surface modifications of nanoparticles required for different biological applications, and to the properties of the modified nanoparticles, a series of chapters describe the state of the art in respect of different types of nanoparticle, including silica nanoparticles, fluorescent nanomaterials, metal nanoparticles, magnetic nanoparticles, carbon-based nanostructures, and other novel nanomaterials. Detailed information is supplied on methods of preparation, chemical and physical properties, and current and potential applications. The closing chapters discuss lithography methods for the top-down approach to nanoparticle synthesis and the use of spectroscopic studies as a tool for the characterization of each nanoparticle. Future prospects and challenges for the development of further nanomaterials with bioapplications are also covered.