Field Guide To Optical Lithography

This Field Guide distills the material written by Chris Mack over the past 20 years, including notes from his graduate-level lithography course at the University of Texas at Austin. It details the lithography process, image formation, imaging onto a photoresist, photoresist chemistry, and lithography control and optimization. An introduction to next-generation lithographic technologies is also included, as well as an extensive lithography glossary and a summation of salient equations critical to anyone involved in the lithography industry.

"The Field Guide to Solar Optics attempts to consolidate and summarize optical topics in solar technologies and engineering that are dispersed throughout literature. The field guide also attempts to clarify topics and terms that could be confusing or at times misused. As with any technology area, optics related to solar technologies can be a wide field. The topics selected for this field guide are ones that are frequently encountered in solar engineering and research for energy harvesting, particularly for electricity generation. Therefore, the topics selected are slanted towards solar thermal or commonly called concentrating solar power. The first section of the field guide provides background on energy needs and usage and where solar technologies fit into the energy mix. The next section covers properties of the sun and develop understandings for solar energy collection. The third section introduces optical properties, concepts, and basic components. In the fourth section, the various optical systems used in solar engineering are described. In solar, optical systems used for solar energy collection is commonly referred to as collectors (e.g., collector field). This term is used frequently in this field guide. Another term commonly used for solar collectors is non-imaging optics. The next section introduces concepts for characterizing optical components/systems and analysis approaches. Lastly, measurement tools commonly used in solar engineering and research are described. The fundamentals of the topics are provided. Providing methods or approaches to designs was not the goal of the field guide. However, the fundamental understanding can be extended and used for design of components and systems"--

Traditional macro-optics can be designed without complex design software tools. However, digital optics, especially wafer-scale micro-optics, require specific software and tools. There is often no analytical solution, and thus complex iterative optimization algorithms may be required. This book covers refractive and diffractive micro-optics, the iterative optimization process, and modeling and fabrication techniques crucial to this field. The ability to create hybrid systems capable of producing analog and digital functionality is also addressed.

Provides a concise overview of physical optics for easy reference, with a focus on information applicable to the field of optical engineering. Within this Field Guide, you will find formulae and descriptions of electromagnetic wave phenomena that are fundamental to the wave theory of light.

This Field Guide covers the various components and types of active electro-optical sensors - referred to as lidars in the text - from simple 2D direct-detection lidars to multiple subaperture synthetic aperture lidars. Other topics covered include receivers, apertures, atmospheric effects, and appropriate processing of different lidars. Lasers and modulation are presented in terms of their use in lidars. The lidar range equation in its many variations is discussed along with receiver noise issues that determine how much signal must be received to detect an object. This book is a handy reference to quickly look up any aspect of active electro-optical sensors. It will be useful to students, lidar scientists, or engineers needing an occasional reminder of the correct approaches or equations in certain applications, and systems engineers interested in gaining a perspective on this rapidly growing technology.

The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components. By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate. This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapter. Additional Information: Visiting http://www.lithoguru.com/textbook/index.html enhances the reader's understanding as the website supplies information on how you can download a free laboratory manual, Optical Lithography Modelling with MATLAB®, to accompany the textbook. You can also contact the author and find help for instructors.

"Today's SWIR, MWIR, LWIR and multispectral technologies cover a wide range of commercial and military applications and continue to rapidly expand in almost every aspect of our lives. This Field Guide focuses on the most common infrared crystals and glasses used in these systems, from their manufacturing methods through modern optical fabrication technologies to the end-use applications. Detailed optical, crystallographic, mechanical, chemical, and thermal properties of the most popular infrared materials are reviewed in detail along with process flows and relative comparisons. The Field Guide to Infrared Optical Materials provides a concise and convenient resource for those interested in the materials used in infrared optical systems"--

Linear systems is a broad and important area in many scientific and engineering disciplines, and it is especially important in optics because it forms the basis for Fourier optics, diffraction theory, image-quality assessment, and many other areas. This Field Guide provides the practicing optical engineer with a reference for the basic concepts and techniques of linear systems, including Fourier series, continuous and discrete Fourier transforms, convolution, sampling and aliasing, and MTF/PSF using the language, notation, and applications from optics, imaging, and diffraction.