Handbook Of Surface Metrology

The Handbook of Surface and Nanometrology explains and challenges current concepts in nanotechnology. It covers in great detail surface metrology and nanometrology and more importantly the areas where they overlap, thereby providing a quantitative means of controlling and predicting processes and performance. Trends and mechanisms are explained wit

Written by the leading authority in the subject, Handbook of Surface Metrology covers every conceivable aspect of measuring and characterizing a surface. Focusing both on theory and practice, the book provides useful guidelines for the design of precision instruments and presents data on the functional importance of surfaces. It also clearly explains the essential theory relevant to surface metrology. The book defines most terms and parameters according to national and international standards. Many examples and illustrations are drawn from the esteemed author's large fund of groundbreaking research work. This unparalleled, all-encompassing "metrology bible" is beneficial for engineering postgraduate students and researchers involved in tribology, instrumentation, data processing, and metrology.

Since the publication of the first edition, miniaturization and nanotechnology have become inextricably linked to traditional surface geometry and metrology. This interdependence of scales has had profound practical implications. Updated and expanded to reflect many new developments, Handbook of Surface and Nanometrology, Second Edition determines how the reduction in scale of size from macro to nano has affected all aspects of surface use and measurement. The book discusses how this shift has extended through characterization, standardization, manufacture, and performance. With nanotechnology now permeating the text, this edition covers new methods of production and measurement as well as new performance requirements. Described as the father of digital metrology by the American Society for Precision Engineering, author David J. Whitehouse explores the range of surface size scales—macro, micro, nano, atomic, and combinations of these. He examines traditional, structured, patterned, and free-form surfaces, emphasizing the growing need to understand the behavior of multiple surfaces. Still the definitive reference in the field, the second edition of this handbook continues to provide in-depth, extensive coverage of the engineering, physics, materials, mathematics, and computing involved in surface metrology and nanometrology. Nothing concerning current surface geometry escapes inclusion or scrutiny in this book.

The importance of surface metrology has long been acknowledged in manufacturing and mechanical engineering, but has now gained growing recognition in an expanding number of new applications in fields such as semiconductors, electronics and optics. Metrology is the scientific study of measurement, and surface metrology is the study of the measurement of rough surfaces. In this book, Professor David Whitehouse, an internationally acknowledged subject expert, covers the wide range of theory and practice, including the use of new methods of instrumentation. · Written by one of the world's leading metrologists · Covers electronics and optics applications as well as mechanical · Written for mechanical and manufacturing engineers, tribologists and precision engineers in industry and academia

Since the publication of the first edition, miniaturization and nanotechnology have become inextricably linked to traditional surface geometry and metrology. This interdependence of scales has had profound practical implications.Updated and expanded to reflect many new developments, Handbook of Surface and Nanometrology, Second Edition determines h

This book offers a genuinely practical introduction to the most commonly encountered optical and non-optical systems used for the metrology and characterization of surfaces, including guidance on best practice, calibration, advantages and disadvantages, and interpretation of results. It enables the user to select the best approach in a given context. Most methods in surface metrology are based upon the interaction of light or electromagnetic radiation (UV, NIR, IR), and different optical effects are utilized to get a certain optical response from the surface; some of them record only the intensity reflected or scattered by the surface, others use interference of EM waves to obtain a characteristic response from the surface. The book covers techniques ranging from microscopy (including confocal, SNOM and digital holographic microscopy) through interferometry (including white light, multi-wavelength, grazing incidence and shearing) to spectral reflectometry and ellipsometry. The non-optical methods comprise tactile methods (stylus tip, AFM) as well as capacitive and inductive methods (capacitive sensors, eddy current sensors). The book provides: Overview of the working principles Description of advantages and disadvantages Currently achievable numbers for resolutions, repeatability, and reproducibility Examples of real-world applications A final chapter discusses examples where the combination of different surface metrology techniques in a multi-sensor system can reasonably contribute to a better understanding of surface properties as well as a faster characterization of surfaces in industrial applications. The book is aimed at scientists and engineers who use such methods for the measurement and characterization of surfaces across a wide range of fields and industries, including electronics, energy, automotive and medical engineering.

Metrology is the study of measurement. It includes all theoretical and practical aspects of measurement and may be divided into three subfields: Scientific or fundamental metrology concerns the establishment of measurement units, unit systems, development of new measurement methods, realization of measurement standards and the transfer of traceability from these standards to users in society. This handbook contains articles dealing with general topics of measurement and articles on particular subjects in mechanics and acoustics, electricity, optics, temperature, time and frequency, chemistry, medicine and particles. The contributions of the first part are sumamrized as follows. Introduction Units Fundamental Constants Fundamentals of Materials Measurement and Testing Measurement of Mass Desnity Measurement and Instrumentation of Flow Ultrasonics Measurement of Basic Electromagnetic Quantities Quantum Electrical Standards Metrology of Time and Frequency Temperature Measurement Metrology in Medicine