Mems And Moems Technology And Applications

The silicon age that led the computer revolution has significantly changed the world. The next 30 years will see the incorporation of new types of functionality onto the chip-structures that will enable the chip to reason, to sense, to act and to communicate. Micromachining technologies offer a wide range of possibilities for active and passive devices. Recent developments have produced sensors, actuators and optical systems. Many of these technologies are based on surface micromachining, which has evolved from silicon integrated circuit technology. This book is written by experts in the field. It contains useful details in design and processing and can be utilized as a reference book or as a textbook.

Cost, size, speed, weight, and precision are driving the miniaturization of mechanical systems. This book presents a detailed look at two micromachining technologies that have evolved from the integrated circuits industry: MEMS (micro-electromechanical systems) and MOEMS (micro systems with a strong optical component). It is useful as a professional reference, technology user's guide, and as a textbook.

The microelectromechanical systems (MEMS) industry has experienced explosive growth over the last decade. Applications range from accelerometers and gyroscopes used in automotive safety to high-precision on-chip integrated oscillators for reference generation and mobile phones. MEMS: Fundamental Technology and Applications brings together groundbreaking research in MEMS technology and explores an eclectic set of novel applications enabled by the technology. The book features contributions by top experts from industry and academia from around the world. The contributors explain the theoretical background and supply practical insights on applying the technology. From the historical evolution of nano micro systems to recent trends, they delve into topics including: Thin-film integrated passives as an alternative to discrete passives The possibility of piezoelectric MEMS Solutions for MEMS gyroscopes Advanced interconnect technologies Ambient energy harvesting Bulk acoustic wave resonators Ultrasonic receiver arrays using MEMS sensors Optical MEMS-based spectrometers The integration of MEMS resonators with conventional circuitry A wearable inertial and magnetic MEMS sensor assembly to estimate rigid body movement patterns Wireless microactuators to enable implantable MEMS devices for drug delivery MEMS technologies for tactile sensing and actuation in robotics MEMS-based micro hot-plate devices Inertial measurement units with integrated wireless circuitry to enable convenient, continuous monitoring Sensors using passive acousto-electric devices in wired and wireless systems Throughout, the contributors identify challenges and pose questions that need to be resolved, paving the way for new applications. Offering a wide view of the MEMS landscape, this is an invaluable resource for anyone working to develop and commercialize MEMS applications.

This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.

This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.

Provides complete and up-to-date coverage of the foundational principles, enabling technologies, and specific instruments of portable spectrometry Portable Spectroscopy and Spectrometry: Volume One is both a timely overview of the miniature technologies used in spectrometry, and an authoritative guide to the specific instruments employed in a wide range of disciplines. This much-needed resource is the first comprehensive work to describe the enabling technologies of portable spectrometry, explain how various handheld and portable instruments work, discuss their potential limitations, and provide clear guidance on optimizing their utility and accuracy in the field. In-depth chapters—written by a team of international authors from a wide range of disciplinary backgrounds—have been carefully reviewed both by the editors and by third-party experts to ensure their quality and completeness. Volume One begins with general discussion of portable spectrometer engineering before moving through the electromagnetic spectrum to cover x-ray fluorescence (XRF), UV-visible, near-infrared, mid-infrared, and Raman spectroscopies. Subsequent chapters examine microplasmas, laser induced breakdown spectroscopy (LIBS), nuclear magnetic resonance (NMR) spectroscopy, and a variety of portable mass spectrometry instrument types. Featuring detailed chapters on DNA instrumentation and biological analyzers—topics of intense interest in light of the global coronavirus pandemic—this timely volume: Provides comprehensive coverage of the principles and instruments central to portable spectroscopy Includes contributions by experienced professionals working in instrument companies, universities, research institutes, the military, and hazardous material teams Discusses special topics such as smartphone spectroscopy, optical filter technology, stand-off detection, and MEMS/MOEMS technology Covers elemental spectroscopy, optical molecular spectroscopy, mass spectrometry, and molecular and imaging technologies Portable Spectroscopy and Spectrometry: Volume One is an indispensable resource for developers of portable instruments, civilian and government purchasers and operators, and teachers and students of portable spectroscopy. When combined with Volume Two, which focuses on the multitude of applications of portable instrumentation, Portable Spectroscopy and Spectrometry provides the most thorough coverage of the field currently available.

This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.

The communication field is evolving rapidly in order to keep up with society’s demands. As such, it becomes imperative to research and report recent advancements in computational intelligence as it applies to communication networks. The Handbook of Research on Recent Developments in Intelligent Communication Application is a pivotal reference source for the latest developments on emerging data communication applications. Featuring extensive coverage across a range of relevant perspectives and topics, such as satellite communication, cognitive radio networks, and wireless sensor networks, this book is ideally designed for engineers, professionals, practitioners, upper-level students, and academics seeking current information on emerging communication networking trends.