Mems And Nanotechnology For Gas Sensors

How Can We Lower the Power Consumption of Gas Sensors? There is a growing demand for low-power, high-density gas sensor arrays that can overcome problems relative to high power consumption. Low power consumption is a prerequisite for any type of sensor system to operate at optimum efficiency. Focused on fabrication-friendly microelectromechanical systems (MEMS) and other areas of sensor technology, MEMS and Nanotechnology for Gas Sensors explores the distinct advantages of using MEMS in low power consumption, and provides extensive coverage of the MEMS/nanotechnology platform for gas sensor applications. This book outlines the microfabrication technology needed to fabricate a gas sensor on a MEMS platform. It discusses semiconductors, graphene, nanocrystalline ZnO-based microfabricated sensors, and nanostructures for volatile organic compounds. It also includes performance parameters for the state of the art of sensors, and the applications of MEMS and nanotechnology in different areas relevant to the sensor domain. In addition, the book includes: An introduction to MEMS for MEMS materials, and a historical background of MEMS A concept for cleanroom technology The substrate materials used for MEMS Two types of deposition techniques, including chemical vapour deposition (CVD) The properties and types of photoresists, and the photolithographic processes Different micromachining techniques for the gas sensor platform, and bulk and surface micromachining The design issues of a microheater for MEMS-based sensors The synthesis technique of a nanocrystalline metal oxide layer A detailed review about graphene; its different deposition techniques; and its important electronic, electrical, and mechanical properties with its application as a gas sensor Low-cost, low-temperature synthesis techniques An explanation of volatile organic compound (VOC) detection and how relative humidity affects the sensing parameters MEMS and Nanotechnology for Gas Sensors provides a broad overview of current, emerging, and possible future MEMS applications. MEMS technology can be applied in the automotive, consumer, industrial, and biotechnology domains.

Metal Oxide Nanostructures as Gas Sensing Devices explores the development of an integrated micro gas sensor that is based on advanced metal oxide nanostructures and is compatible with modern semiconductor fabrication technology. This sensor can then be used to create a compact, low-power, handheld device for analyzing air ambience. The book first covers current gas sensing tools and discusses the necessity for miniaturized sensors. It then focuses on the materials, devices, and techniques used for gas sensing applications, such as resistance and capacitance variations. The author addresses the issues of sensitivity, concentration, and temperature dependency as well as the response and recovery times crucial for sensors. He also presents techniques for synthesizing different metal oxides, particularly those with nanodimensional structures. The text goes on to highlight the gas sensing properties of many nanostructured metal oxides, from aluminum and cerium to iron and titanium to zinc and zirconium. The final chapters deal with existing and future devices that are based on nanostructures. Miniaturized systems that analyze air ambience need sensors capable of identifying different gaseous species. Exploring state-of-the-art gas sensing devices, this book shows how nanostructured metal oxides are ideally suited for use as gas sensing elements.

This book covers the whole range of gas sensing aspects starting from basics, synthesis, processing, characterization, and application developments. All sub-topics within the domain of gas sensors such as active materials, novel nanomaterials, working mechanisms, fabrication techniques, computational approach, and development of microsensors, and latest advancements such as the Internet of Things (IoT) in gas sensors, and nanogenerators, are explained as well. Related manufacturing sections and proposed direction of future research are also reviewed. Features: Covers detailed state-of-the-art specific chemiresistive sensing materials. Presents novel nanomaterial platforms and concepts for resistive gas sensing. Reviews pertinent aspects of smart sensors and IoT sensing. Explains nanotechnology-enabled experimental findings, and future directions of smart gas sensing technology. Explores implication of latest advancements such as IoT in gas sensors, and nanogenerators. This book is aimed at academic researchers and professionals in sensors and actuators, nanotechnology, and materials science.

Solid State Gas Sensing offers insight into the principles, applications, and new trends in gas sensor technology. Developments in this field are rapidly advancing due to the recent and continuing impact of nanotechnology, and this book addresses the demand for small, reliable, inexpensive and portable systems for monitoring environmental concerns, indoor air quality, food quality, and many other specific applications. Working principles, including electrical, permittivity, field effect, electrochemical, optical, thermometric and mass (both quartz and cantilever types), are discussed, making the book valuable and accessible to a variety of researchers and engineers in the field of material science.

Advanced Gas Sensing focuses on the Electroadsorptive Effect: its theory, experimental measurement and applications in consumer gas sensors as well as in surface physics laboratory work. The Electroadsorptive Effect is invaluable when used in MEMS gas sensors. The authors use a general approach that covers new insights into temperature modulation and the use of light. The emphasis is given to electrical fields in gas sensors, which cause the Electroadsorptive Effect. The effect has long been known by experts working in the field, but has been regarded as too difficult for use until recently because of increasing sensor miniaturization. The book will serve as an introduction to sensitivity tuning of semiconductor gas sensors, introducing the underlying theory and experimental models before moving on to design considerations, applications and market considerations. A literature review and examples of experimental data are included.

This book provides a comprehensive overview of the current state-of-art in oxide nanostructures, carbon nanostructures and 2D materials fabrication. It covers mimicking of sensing mechanisms and applications in gas sensors. It focuses on gas sensors based on functional nanostructured materials, especially related to issues of sensitivity, selectivity, and temperature dependency for sensors. It covers synthesis, properties, and current gas sensing tools and discusses the necessity for miniaturized sensors. This book will be of use to senior undergraduate and graduate students, professionals, and researchers in the field of solid-state physics, materials science, surface science and chemical engineering.

Nanostructured materials exhibit distinct properties by virtue of their nanoscale morphological variations, which open up endless possibilities to investigate unexplored and interesting applications. This textbook broadly covers the fabrication and characterization of nanostructured films and exploration of their gas-sensing applications. It presents the fundamentals of gas-sensing technology and a comprehensive study on smart gas sensing technology. Readers will find basics, analytical techniques, nanotechnology-enabled experimental findings, and future directions of smart gas-sensing technology at one place. Through the inclusion of up-to-date experimental knowledge of synthesis, processing, and application development, the book is suitable for academics at all levels.

The integration of microelectromechanical systems (MEMS) and nanotechnology (NT) in sensors and devices significantly reduces their weight, size, power consumption, and production costs. These sensors and devices can then play greater roles in defense operations, wireless communication, the diagnosis and treatment of disease, and many more applications. MEMS and Nanotechnology-Based Sensors and Devices for Communications, Medical and Aerospace Applications presents the latest performance parameters and experimental data of state-of-the-art sensors and devices. It describes packaging details, materials and their properties, and fabrication requirements vital for design, development, and testing. Some of the cutting-edge materials covered include quantum dots, nanoparticles, photonic crystals, and carbon nanotubes (CNTs). This comprehensive work encompasses various types of MEMS- and NT-based sensors and devices, such as micropumps, accelerometers, photonic bandgap devices, acoustic sensors, CNT-based transistors, photovoltaic cells, and smart sensors. It also discusses how these sensors and devices are used in a number of applications, including weapons’ health, battlefield monitoring, cancer research, stealth technology, chemical detection, and drug delivery.