Microactuators

219 8. 2 Sensors 221 8. 3 Physical Sensors 222 8. 3. 1 Electrical Sensing Means 223 8. 3. 2 Magnetic Field Methods 231 8. 3. 3 Optical Methods 232 8. 4 Chemical Sensors 241 8. 4. 1 Electrical Gas and Chemical Sensors 243 8. 4. 2 Guided-Optics Intrinsic Chemical Sensors 246 8. 4. 3 Extrinsic Chemical Sensors 250 8. 4. 4 Polymer Waveguide Chemical Sensors 251 8. 4. 5 Surface Plasmon Chemical Sensors 252 8. 4. 6 Indicator-Mediated Extrinsic Sensing 253 8. 4. 7 Optical Biosensors 256 8. 4. 8 Ultrasonic Gas and Chemical Sensors 257 8. 4. 9 Intelligent Sensors 258 8. 5 Connections/Links and Wiring 258 8. 5. 1 Optical Links 260 8. 5. 2 Requirement on the Processing Unit/Intelligence 262 8. 6 Actuators 263 8. 7 Signal Processing/Computing 264 8. 7. 1 Implicit Computation 266 8. 7. 2 Explicit Computation 267 8. 8 References 274 Subject Index 279 Micro-Actuators (Electrical, Magnetic, Thermal, Optical, Mechanical, and Chemical) It has become quite apparent that sensors and actuators are the main bottleneck of the modem information processing and control systems. Microprocessors and computers used to be the main limiting element in most information processing systems. But thanks to the enonnous progress in the microelectronics industry, most information analysis tasks can be processed in real time. The data has to be acquired by the processor in some form and processed and used to produce some useful function in the real world.

Overview of recent achievements, describing the microactuator development of microvalves and liner actuators comprehensively from concept through prototype. Further key aspects included are three-dimensional models for handling complex SMA actuator geometries and coupled simulation routines that take multifunctional properties into account. Mechanical and thermal optimization criteria are introduced for actuator design, allowing an optimum use of the shape memory effect. It is shown that some of the prototypes presented, e.g. SMA microgrippers, already outperform conventional components.

This book presents a basic introduction to micromechanisms and microactuators, particularly to their basic configurations and design. This book fills the persisting gap in the published literature on the mechanical manipulative aspects of micromechanisms. It also helps in offering specialized introductory courses on micromechanisms and microactuators not as part of MEMS sensing devices, but as mechanical manipulative systems. The level of the book is suitable for use in both undergraduate and introductory graduate programmes. The book presents an overview of miniaturization and scaling laws, basic design principles of micro-sized mechanisms and actuators, micro-fabrication processes, and some futuristic issues. The volume contains a large number of figures and illustrations for easy understanding by the readers. It will also be useful to researchers and professionals looking for an introduction to the topic.

The giant magneto-strain effect in Ni-Mn-Ga alloys is particularly attractive for actuator applications. Two different approaches are being pursued to develop MSM microactuators. To observe large deflections of Ni-Mn-Ga microactuators, the material should be exhibiting low twinning stress and large magnetic anisotropy. In addition, design rules and boundary conditions for operating the Ni-Mn-Ga actuator material are having significant importance for evolution of performance characteristics.

This book contains applications of micromechanisms and microactuators in several very modern technical fields such as mechatronics, biomechanics, machines, micromachines, robotics and apparatuses. In connection with its topic, the work combines the theoretical results with experimental tests on micromechanisms and microactuators. The book presents the most recent research advances in Machine and Mechanisms Science. It includes the accepted reviewed papers of researchers specialized in the topics of the conference: microactuators and micro-assembly, micro sensors involving movable solids, micro-opto-mechanical devices, mechanical tools for cell and tissue studies, micromanipulation and micro-stages, micro-scale flight and swimming, micro-robotics and surgical tools, micron-scale power generation, miniature manufacturing machines, micromechatronics and micro-mechanisms, biomechanics micro and nano scales and control issues in microsystems. The presented applications of micromechanisms and microactuators in many technical fields will interest industrial companies and encourage scientifical knowledge and cooperation between academia and industry.