Micromechanics And Microactuators

This book contains selected papers presented at MAMM 2010, the First Workshop on Microactuators and Micromechanisms. This workshop has brought together scientists, industry experts and students and has provided a special opportunity for know-how exchange and collaboration in various disciplines referring to microsystems technology. The conference was organized by the Technical Committees of Mechanical Transmissions and Micromachines under the patronage of IFToMM, the International Federation for the Promotion of Mechanism and Machine Science.

Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer.

Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, including the latest on magnetic sensors, temperature sensors and microreaction chambers. The book outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, among other topics. New sections include discussions on magnetic and temperature sensors and the industrial applications of smart micro-electro-mechanical systems (MEMS). The book is an invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry. In addition, engineers looking for industrial sensing, monitoring and automation solutions will find this a comprehensive source of information. Contains new chapters that address key applications, such as magnetic sensors, microreaction chambers and temperature sensors Provides an in-depth information on a wide array of industrial applications for smart sensors and smart MEMS Presents the only book to discuss both smart sensors and MEMS for industrial applications

219 8. 2 Sensors 221 8. 3 Physical Sensors 222 8. 3. 1 Electrical Sensing Means 223 8. 3. 2 Magnetic Field Methods 231 8. 3. 3 Optical Methods 232 8. 4 Chemical Sensors 241 8. 4. 1 Electrical Gas and Chemical Sensors 243 8. 4. 2 Guided-Optics Intrinsic Chemical Sensors 246 8. 4. 3 Extrinsic Chemical Sensors 250 8. 4. 4 Polymer Waveguide Chemical Sensors 251 8. 4. 5 Surface Plasmon Chemical Sensors 252 8. 4. 6 Indicator-Mediated Extrinsic Sensing 253 8. 4. 7 Optical Biosensors 256 8. 4. 8 Ultrasonic Gas and Chemical Sensors 257 8. 4. 9 Intelligent Sensors 258 8. 5 Connections/Links and Wiring 258 8. 5. 1 Optical Links 260 8. 5. 2 Requirement on the Processing Unit/Intelligence 262 8. 6 Actuators 263 8. 7 Signal Processing/Computing 264 8. 7. 1 Implicit Computation 266 8. 7. 2 Explicit Computation 267 8. 8 References 274 Subject Index 279 Micro-Actuators (Electrical, Magnetic, Thermal, Optical, Mechanical, and Chemical) It has become quite apparent that sensors and actuators are the main bottleneck of the modem information processing and control systems. Microprocessors and computers used to be the main limiting element in most information processing systems. But thanks to the enonnous progress in the microelectronics industry, most information analysis tasks can be processed in real time. The data has to be acquired by the processor in some form and processed and used to produce some useful function in the real world.

MEMS Linear and Nonlinear Statics and Dynamics presents the necessary analytical and computational tools for MEMS designers to model and simulate most known MEMS devices, structures, and phenomena. This book also provides an in-depth analysis and treatment of the most common static and dynamic phenomena in MEMS that are encountered by engineers. Coverage also includes nonlinear modeling approaches to modeling various MEMS phenomena of a nonlinear nature, such as those due to electrostatic forces, squeeze-film damping, and large deflection of structures. The book also: Includes examples of numerous MEMS devices and structures that require static or dynamic modeling Provides code for programs in Matlab, Mathematica, and ANSYS for simulating the behavior of MEMS structures Provides real world problems related to the dynamics of MEMS such as dynamics of electrostatically actuated devices, stiction and adhesion of microbeams due to electrostatic and capillary forces MEMS Linear and Nonlinear Statics and Dynamics is an ideal volume for researchers and engineers working in MEMS design and fabrication.

Signal Processing is one of the large specializations in electrical engineering, mechanical engineering and computer sciences. It derives input from physics, mathematics and is an indispensable feature of all natural- and life sciences in research and in application. The snew series "Advanced Issues on Signals, Systems and Devices" presents original publications mainly from speakers on the International Conferences on Signal Systems and Devices but also from other international authors. The Conference is a forum for researchers and specialists in different fields covering all types of sensors and measurement systems as for example: Biomedical and Environmental Measurements & Instrumentation; Optical, Chemical and Biomedical Sensors; Mechanical and Thermal Sensors; Micro-Sensors and MEMS-Technology; Nano Sensors, Nano Systems and Nano Technology; Spectroscopy Methods; Signal Processing and Modelling; Multi Sensor Data Fusion; Data Acquisition & Distributed Measurements; Medical and Environmental Applications; Circuit Test, Device Characterization and Modelling; Custom and Semi-Custom Circuits; Analog Circuit Design; Low-Voltage, Low-Power VLSI Design; Hardware Implementation; Materials, Devices and Interconnects; Packaging and Reliability; Battery Monitoring: Impedance Spectroscopy for Measurement and Sensor Solutions; Energy Harvesting and Wireless power Transfer Systems; Wireless Sensor Networks in Industrial Plants This first volume of the new series mainly devotes to the most recent research and implementation of sensors-, circuit systems in signal processing, energy harvesting, nano- and molecular electronics.