Nano Tribology And Materials In Mems

This book brings together recent developments in the areas of MEMS tribology, novel lubricants and coatings for nanotechnological applications, biomimetics in tribology and fundamentals of micro/nano-tribology. Tribology plays important roles in the functioning and durability of machines at small length scales because of the problems associated with strong surface adhesion, friction, wear etc. Recently, a number of studies have been conducted to understand tribological phenomena at nano/micro scales and many new tribological solutions for MEMS have been proposed.

This second edition of Handbook of Micro/Nanotribology addresses the rapid evolution within this field, serving as a reference for the novice and the expert alike. Two parts divide this handbook: Part I covers basic studies, and Part II addresses design, construction, and applications to magnetic storage devices and MEMS. Discussions include: surface physics and methods for physically and chemically characterizing solid surfaces roughness characterization and static contact models using fractal analysis sliding at the interface and friction on an atomic scale scratching and wear as a result of sliding nanofabrication/nanomachining as well as nano/picoindentation lubricants for minimizing friction and wear surface forces and microrheology of thin liquid films measurement of nanomechanical properties of surfaces and thin films atomic-scale simulations of interfacial phenomena micro/nanotribology and micro/nanomechanics of magnetic storage devices This comprehensive book contains 16 chapters contributed by more than 20 international researchers. In each chapter, the presentation starts with macroconcepts and then lead to microconcepts. With more than 500 illustrations and 50 tables, Handbook of Micro/Nanotribology covers the range of relevant topics, including characterization of solid surfaces, measurement techniques and applications, and theoretical modeling of interfaces. What's New in the Second Edition? New chapters on: AFM instrumentation Surface forces and adhesion Design and construction of magnetic storage devices Microdynamical devices and systems Mechanical properties of materials in microstructure Micro/nanotribology and micro/nanomechanics of MEMS devices

Nanotribology: Critical Assessment and Research Needs is an excellent reference for both academic and industrial researchers working in the fields of nanotechnology, tribology, mechanical engineering, materials science and engineering, MEMS, NEMS, magnetic recording, and biomedical devices. It will also be of interest to those pursuing scanning probe microscopy, nanoimaging, mesomanufacturing, sensors, actuators, aerospace, defense (controllers, microsystems), and military systems. Nanotribology: Critical Assessment and Research Needs provides a critical assessment of the current state of the art of nanotribology within the context of MEMS, mesomanufacturing, nanotechnology and microsystems. It contains chapters written by the leading experts in these fields. It identifies gaps in current knowledge and barriers to applications, and recommends research areas that need to be addressed to enable the rapid development of technologies.

Micro Electro Mechanical Systems (MEMS) is already about a billion dollars a year industry and is growing rapidly. So far major emphasis has been placed on the fabrication processes for various devices. There are serious issues related to tribology, mechanics, surfacechemistry and materials science in the operationand manufacturingof many MEMS devices and these issues are preventing an even faster commercialization. Very little is understood about tribology and mechanical properties on micro- to nanoscales of the materials used in the construction of MEMS devices. The MEMS community needs to be exposed to the state-of-the-artoftribology and vice versa. Fundamental understanding of friction/stiction, wear and the role of surface contamination and environmental debris in micro devices is required. There are significantadhesion, friction and wear issues in manufacturing and actual use, facing the MEMS industry. Very little is understood about the tribology of bulk silicon and polysilicon films used in the construction ofthese microdevices. These issues are based on surface phenomenaand cannotbe scaled down linearly and these become increasingly important with the small size of the devices. Continuum theory breaks down in the analyses, e. g. in fluid flow of micro-scale devices. Mechanical properties ofpolysilicon and other films are not well characterized. Roughness optimization can help in tribological improvements. Monolayers of lubricants and other materials need to be developed for ultra-low friction and near zero wear. Hard coatings and ion implantation techniques hold promise.

This book broadens the knowledge of tribology. This book is evolved out of current research trends on tribological performance of systems related to nano tribology, rheology, engines, polymer brushes, composite materials, erosive wear and lubrication. The book deals with enhancing the ideas on tribological properties, the different types of wear phenomenon and lubrication enhancement. Further, the tribological performance of systems, whether nano, micro or macro-scale, depends upon a large number of external parameters and important among them are temperature, contact pressure and relative speed. Thus, the book focus on the theoretical aspects to industrial applications of tribology.

The recent emergence and proliferation of proximal probes, e.g. SPM and AFM, and computational techniques for simulating tip-surface interactions has enabled the systematic investigation of interfacial problems on ever smaller scales, as well as created means for modifying and manipulating nanostructures. In short, they have led to the appearance of the new, interdisciplinary fields of micro/nanotribology and micro/nanomechanics. This volume serves as a timely, practical introduction to the principles of nanotribology and nanomechanics and applications to magnetic storage systems and MEMS/NEMS. Assuming some familiarity with macrotribology/mechanics, the book comprises chapters by internationally recognized experts, who integrate knowledge of the field from the mechanics and materials-science perspectives. They cover key measurement techniques, their applications, and theoretical modelling of interfaces, each beginning their contributions with macro- and progressing to microconcepts. After reviewing the fundamental experimental and theoretical aspects in the first part, Nanotribology and Nanomechanics then treats applications. Three groups of readers are likely to find this text valuable: graduate students, research workers, and practicing engineers. It can serve as the basis for a comprehensive, one- or two-semester course in scanning probe microscopy; applied scanning probe techniques; or nanotribology/nanomechanics/nanotechnology, in departments such as mechanical engineering, materials science, and applied physics. With a Foreword by Physics Nobel Laureate Gerd Binnig Dr. Bharat Bhushan is an Ohio Eminent Scholar and The Howard D. Winbigler Professor in the Department of Mechanical Engineering, Graduate Research Faculty Advisor in the Department of Materials Science and Engineering, and the Director of the Nanotribology Laboratory for Information Storage & MEMS/NEMS (NLIM) at the Ohio State University, Columbus, Ohio. He is an internationally recognized expert of tribology and mechanics on the macro- to nanoscales, and is one of the most prolific authors. He is considered by some a pioneer of the tribology and mechanics of magnetic storage devices and a leading researcher in the fields of nanotribology and nanomechanics using scanning probe microscopy and applications to micro/nanotechnology. He is the recipient of various international fellowships including the Alexander von Humboldt Research Prize for Senior Scientists, Max Planck Foundation Research Award for Outstanding Foreign Scientists, and the Fulbright Senior Scholar Award.

This volume serves as a timely, practical introduction to the principles of nanotribology and nanomechanics and applications to magnetic storage systems and MEMS/NEMS. Assuming some familiarity with macrotribology/mechanics, the book comprises chapters by internationally recognized experts, who integrate knowledge of the field from the mechanics and materials-science perspectives. Graduate students, research workers, and practicing engineers will find the book of value.

"This book covers two important areas with implications across a range of engineering disciplines - Tribology and Nanotechnology. The emerging field of micro and nanotribology seeks to identify surface phenomena such as adhesion, friction, wear, and lubrication, from an atomic and molecular level." "In this book, the authors will discuss analytical surface tools with atomic resolution, which are necessary for the study of these issues. Many of the research results included in this book are the authors' original work, some of which appear for the first time or are unpublished. The audience for this book will include practicing Tribologists as well as researchers in this field, in addition to any industry professional concerned with tribology issues on a nanoscale level. This includes MEMS and Materials Science engineers."--BOOK JACKET.