Nanolithography

Success in the fabrication of structures at the nanometer length scale has opened up a new horizon to condensed matter physics: the study of quantum phenomena in confined boxes, wires, rings, etc. A new class of electronic devices based on this physics has been proposed, with the promise of a new functionality for ultrafast and/or ultradense electronic circuits. Such applications demand highly sophisticated fabrication techniques, the crucial one being lithography. Nanolithography contains updated reviews by major experts on the well established techniques -- electron beam lithography (EBL), X-ray lithography (XRL), ion beam lithography (IBL) -- as well as on emergent techniques, such as scanning tunnelling lithography (STL).

Integrated circuits, and devices fabricated using the techniques developed for integrated circuits, have steadily gotten smaller, more complex, and more powerful. The rate of shrinking is astonishing – some components are now just a few dozen atoms wide. This book attempts to answer the questions, “What comes next? and “How do we get there? Nanolithography outlines the present state of the art in lithographic techniques, including optical projection in both deep and extreme ultraviolet, electron and ion beams, and imprinting. Special attention is paid to related issues, such as the resists used in lithography, the masks (or lack thereof), the metrology needed for nano-features, modeling, and the limitations caused by feature edge roughness. In addition emerging technologies are described, including the directed assembly of wafer features, nanostructures and devices, nano-photonics, and nano-fluidics. This book is intended as a guide to the researcher new to this field, reading related journals or facing the complexities of a technical conference. Its goal is to give enough background information to enable such a researcher to understand, and appreciate, new developments in nanolithography, and to go on to make advances of his/her own. Outlines the current state of the art in alternative nanolithography technologies in order to cope with the future reduction in size of semiconductor chips to nanoscale dimensions Covers lithographic techniques, including optical projection, extreme ultraviolet (EUV), nanoimprint, electron beam and ion beam lithography Describes the emerging applications of nanolithography in nanoelectronics, nanophotonics and microfluidics

Scanning probe techniques. Scanning probe microscopy based nanoscale patterning and fabrication / X. N. Xie, H. J. Chung and A. T. S. Wee. Nanoscale characterization by scanning tunneling microscopy / H. Xu ... [et al.] -- Nanofabrication. EUV lithography for semiconductor manufacturing and nanofabrication / H. Kinoshita. Synchrotron-radiation-supported high-aspect-ratio nanofabrication / A. Chen ... [et al.] -- Functional nanomaterials. Chemical interactions at noble metal nanoparticle surfaces - catalysis, sensors and devices / A. S. Nair. Diamond-like carbon : a new material base for nano-architectures / X. Li and D. H. C. Chua. Hotplate technique for nanomaterials / Y. Zhu and C. H. Sow -- Molecular engineering. [Pie symbol]-d interaction based molecular conducting magnets : how to increase the effects of the [Pie symbol]-d interaction / A. Miyazaki and T. Enoki. Recent developments on porphyrin assemblies / R. Charvet ... [et al.] -- Bionanotechnology and nanomedicine. Nanostructures from designer peptides / B. T. Ong, P. K. Ajikumar and S. Valiyaveettil. Nanotechnology and human diseases / G. Y. H. Lee and C. T. Lim. Nanomedicine : nanoparticles of biodegradable polymers for cancer diagnosis and treatment / S. S. Feng.

The most complete book available on scanning probe lithography (SPL), this work details the modalities, mechanisms, and current technologies, applications, and materials on which SPL can be performed. It provides a comprehensive overview of this simple and cost-effective technique, which does not require clean room conditions and can be performed in any lab or industry facility to achieve high-resolution and high-quality patterns on a wide range of materials: biological, semiconducting, polymers, and 2D materials. • Introduces historical background of SPL, including evolution of the technique and tools • Explains the mechanism of sample modification/manipulation, types of AFM tips, technical parts of the experimental setup, and materials on which the technique can be applied • Shows the different types of devices and structures fabricated by SPL, together with the processing steps • Contains a complete and state-of-the art package of examples and different approaches, performed by different international research groups • Summarizes strengths, limitations, and potential of SPL This book is aimed at advanced students, technicians, and researchers in materials science, microelectronics, and others working with lithographic techniques and fabrication processes.

This book is a printed edition of the Special Issue "Laser-Based Nano Fabrication and Nano Lithography" that was published in Nanomaterials

The book series Nanomaterials for the Life Sciences, provides an in-depth overview of all nanomaterial types and their uses in the life sciences. Each volume is dedicated to a specific material class and covers fundamentals, synthesis and characterization strategies, structure-property relationships and biomedical applications. The series brings nanomaterials to the Life Scientists and life science to the Materials Scientists so that synergies are seen and developed to the fullest. Written by international experts of various facets of this exciting field of research, the series is aimed at scientists of the following disciplines: biology, chemistry, materials science, physics, bioengineering, and medicine, together with cell biology, biomedical engineering, pharmaceutical chemistry, and toxicology, both in academia and fundamental research as well as in pharmaceutical companies. VOLUME 5 - Nanostructured Thin Films and Surfaces

Nanofabrication is critical to the realization of potential benefits in the field of electronics, bioengineering and material science. One enabling technology in nanofabrication is Tip-Based Nanofabrication, which makes use of functionalized micro-cantilevers with nanoscale tips. Tip-Based Nanofabrication: Fundamentals and Applications discusses the development of cantilevered nanotips and how they evolved from scanning probe microscopy and are able to manipulate environments at nanoscale on substrates generating different nanoscale patterns and structures. Also covered are the advantages of ultra-high resolution capability, how to use tip based nanofabrication technology as a tool in the manufacturing of nanoscale structures, single-probe tip technologies, multiple-probe tip methodology, 3-D modeling using tip based nanofabrication and the latest in imaging technology.