Present State Of The Classical Theory Of Quantitative Electron Probe Microanalysis

Although the foundations for a procedure of data reduction in quantitative electron probe analysis have not been changed for several years, there has been progress in the choice of expressions, parameters, and constants. A brief account of recommended expressions and procedures is given. Reference is made to the Standard Reference Materials of Au-Ag and Au-Cu alloys issued for electron probe microanalysis.These are especially useful for investigating the application of correction procedures.

Quantitative Microbeam Analysis provides a comprehensive introduction to the field of quantitative microbeam analysis (MQA). MQA is a technique used to analyze subatomic quantities of materials blasted from a surface by a laser or particle beam, providing information on the structure and composition of the material. Contributed to by international experts, the book is unique in the breadth of microbeam analytical techniques covered. For each technique, it develops the theoretical background, discusses practical details relating to choice of equipment, and describes the current advances. The book highlights developments relating to Auger electron spectroscopy in scanning electron microscopes and transmission electron microscopes and advances in surface analytical imaging and accelerated ion beam-surface interactions.

Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.