Run To Run Control In Semiconductor Manufacturing

Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.

A practical guide to semiconductor manufacturing from processcontrol to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Controlcovers all issues involved in manufacturing microelectronic devicesand circuits, including fabrication sequences, process control,experimental design, process modeling, yield modeling, and CIM/CAMsystems. Readers are introduced to both the theory and practice ofall basic manufacturing concepts. Following an overview of manufacturing and technology, the textexplores process monitoring methods, including those that focus onproduct wafers and those that focus on the equipment used toproduce wafers. Next, the text sets forth some fundamentals ofstatistics and yield modeling, which set the foundation for adetailed discussion of how statistical process control is used toanalyze quality and improve yields. The discussion of statistical experimental design offers readers apowerful approach for systematically varying controllable processconditions and determining their impact on output parameters thatmeasure quality. The authors introduce process modeling concepts,including several advanced process control topics such asrun-by-run, supervisory control, and process and equipmentdiagnosis. Critical coverage includes the following: * Combines process control and semiconductor manufacturing * Unique treatment of system and software technology and managementof overall manufacturing systems * Chapters include case studies, sample problems, and suggestedexercises * Instructor support includes electronic copies of the figures andan instructor's manual Graduate-level students and industrial practitioners will benefitfrom the detailed exami?nation of how electronic materials andsupplies are converted into finished integrated circuits andelectronic products in a high-volume manufacturingenvironment. An Instructor's Manual presenting detailed solutions to all theproblems in the book is available from the Wiley editorialdepartment. An Instructor Support FTP site is also available.

Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semiconductor Manufacturing Technology, Second Edition features new and updated material that keeps it at the vanguard of today's most dynamic and rapidly growing field. Iconic experts Robert Doering and Yoshio Nishi have again assembled a team of the world's leading specialists in every area of semiconductor manufacturing to provide the most reliable, authoritative, and industry-leading information available. Stay Current with the Latest Technologies In addition to updates to nearly every existing chapter, this edition features five entirely new contributions on... Silicon-on-insulator (SOI) materials and devices Supercritical CO2 in semiconductor cleaning Low-κ dielectrics Atomic-layer deposition Damascene copper electroplating Effects of terrestrial radiation on integrated circuits (ICs) Reflecting rapid progress in many areas, several chapters were heavily revised and updated, and in some cases, rewritten to reflect rapid advances in such areas as interconnect technologies, gate dielectrics, photomask fabrication, IC packaging, and 300 mm wafer fabrication. While no book can be up-to-the-minute with the advances in the semiconductor field, the Handbook of Semiconductor Manufacturing Technology keeps the most important data, methods, tools, and techniques close at hand.

This Introduction to Manufacturing focuses students on the issues that matter to practicing industrial engineers and managers. It offers a systems perspective on designing, managing, and improving manufacturing operations. On each topic, it covers the key issues, with pointers on where to dig deeper. Unlike the many textbooks on operations management, supply chain management, and process technology, this book weaves together these threads as they interact in manufacturing. It has five parts: Getting to Know Manufacturing: Fundamental concepts of manufacturing as an economic activity, from manufacturing strategy to forecasting market demand Engineering the Factory: Physical design of factories and processes, the necessary infrastructure and technology for manufacturing Making Information Flow: The "central nervous system" that triggers and responds to events occurring in production Making Materials Flow: The logistics of manufacturing, from materials handling inside the factory via warehousing to supply chain management Enhancing Performance: Managing manufacturing performance and methods to maintain and improve it, both in times of normal operations and emergencies Supported with rich illustrations and teaching aids, Introduction to Manufacturing is essential reading for industrial engineering and management students – of all ages and backgrounds – engaged in the vital task of making the things we all use.

The new 4th edition of Seborg’s Process Dynamics Control provides full topical coverage for process control courses in the chemical engineering curriculum, emphasizing how process control and its related fields of process modeling and optimization are essential to the development of high-value products. A principal objective of this new edition is to describe modern techniques for control processes, with an emphasis on complex systems necessary to the development, design, and operation of modern processing plants. Control process instructors can cover the basic material while also having the flexibility to include advanced topics.

This book provides a new approach to the control of food transformation processes, emphasizing the advantage of considering the system as a multivariable one, and taking a holistic approach to the decision-making process in the plant, considering not only the technical but also the economic implications of these decisions. In addition, it presents a hierarchical structure for the global control of the plant, and includes appropriate techniques for each of the control layers. The book addresses the challenges of modeling food transformation processes, using both traditional system-identification techniques and, where these prove impractical, models based on expert knowledge and using fuzzy systems. The construction of optimal controllers for each of these types of models is also discussed, as a means to close a feedback loop on the higher-level outputs of the process. Finally, the problem of production planning is covered from two standpoints: the traditional batch-sizing problem, and the planning of production throughout the season. Systematic season-wide production planning is built upon the models constructed for the control of the plant, and incorporates market- and business-specific information. Examples based on the processing of various foodstuffs help to illustrate the text throughout, while the book’s closing chapter presents a case study on advances in the processing of olive oil. Given its scope, the book will primarily be of interest to two groups of readers: food engineering practitioners and students, who are familiar with the characteristics of food processes but have little or no background in control engineering; and control engineering researchers, students and practitioners, whose situation is just the opposite, and who wish to learn more about food engineering and its specific challenges for control. Advances in Industrial Control reports and encourages the transfer of technology in control engineering. The rapid development of control technology has an impact on all areas of the control discipline. The series offers an opportunity for researchers to present an extended exposition of new work in all aspects of industrial control.