Semiconductor Fabrication

A practical guide to semiconductor manufacturing from processcontrol to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Controlcovers all issues involved in manufacturing microelectronic devicesand circuits, including fabrication sequences, process control,experimental design, process modeling, yield modeling, and CIM/CAMsystems. Readers are introduced to both the theory and practice ofall basic manufacturing concepts. Following an overview of manufacturing and technology, the textexplores process monitoring methods, including those that focus onproduct wafers and those that focus on the equipment used toproduce wafers. Next, the text sets forth some fundamentals ofstatistics and yield modeling, which set the foundation for adetailed discussion of how statistical process control is used toanalyze quality and improve yields. The discussion of statistical experimental design offers readers apowerful approach for systematically varying controllable processconditions and determining their impact on output parameters thatmeasure quality. The authors introduce process modeling concepts,including several advanced process control topics such asrun-by-run, supervisory control, and process and equipmentdiagnosis. Critical coverage includes the following: * Combines process control and semiconductor manufacturing * Unique treatment of system and software technology and managementof overall manufacturing systems * Chapters include case studies, sample problems, and suggestedexercises * Instructor support includes electronic copies of the figures andan instructor's manual Graduate-level students and industrial practitioners will benefitfrom the detailed exami?nation of how electronic materials andsupplies are converted into finished integrated circuits andelectronic products in a high-volume manufacturingenvironment. An Instructor's Manual presenting detailed solutions to all theproblems in the book is available from the Wiley editorialdepartment. An Instructor Support FTP site is also available.

Over the last fifty-plus years, the increased complexity and speed of integrated circuits have radically changed our world. Today, semiconductor manufacturing is perhaps the most important segment of the global manufacturing sector. As the semiconductor industry has become more competitive, improving planning and control has become a key factor for business success. This book is devoted to production planning and control problems in semiconductor wafer fabrication facilities. It is the first book that takes a comprehensive look at the role of modeling, analysis, and related information systems for such manufacturing systems. The book provides an operations research- and computer science-based introduction into this important field of semiconductor manufacturing-related research.

The #1 book in the industry for more than 15 years! Utilizing a straightforward, math-free pathology, this is a novice-friendly guide to the semiconductor fabrication process from raw materials through shipping the finished, packaged device. Challenging quizzes and review summaries make this the perfect learning guide for technicians in training. * NEW chapter on nanotechnology * NEW sections on 300mm wafer processing * Processes and devices, and Green processing * Every chapter updated to reflect the latest processing techniques

In the realm of modern technology, semiconductor fabrication stands as a cornerstone of innovation, enabling the creation of ever-smaller, faster, and more powerful electronic devices. At the heart of this intricate process lies the cleanroom, an ultra-pure environment meticulously controlled to maintain the integrity of microscopic components. This meticulously constructed chamber is a testament to human ingenuity, a sanctuary where dust particles are measured in microns and the slightest disturbance can disrupt the delicate dance of fabrication. This comprehensive guide delves into the fascinating world of cleanrooms, exploring their intricate design, construction, and operation. From the fundamentals of air filtration and laminar flow to the intricacies of personnel access and environmental control, this book unveils the intricate mechanisms that safeguard the purity of these controlled environments. As you embark on this journey into the world of cleanrooms, let us imagine a towering cleanroom facility, its gleaming walls reflecting the precision of its purpose. Within this sterile expanse, delicate semiconductor wafers glide along intricate robotic arms, each movement meticulously choreographed to minimize the risk of contamination. The air is eerily still, devoid of any airborne particles, ensuring that these microscopic masterpieces remain pristine. This book is not merely a collection of technical specifications and procedural guidelines; it is an invitation to appreciate the delicate balance that underpins semiconductor fabrication. We will delve into the impact of contaminants on device performance, exploring the microscopic world that threatens to disrupt the purity of these intricate structures. Along the way, we will encounter real-world examples of cleanroom implementation, showcasing innovative designs and emerging technologies that are pushing the boundaries of cleanliness. We will witness the integration of advanced filtration systems, the application of ultraviolet light for contaminant reduction, and the development of sophisticated monitoring and control systems. As we conclude our exploration, let us reflect on the enduring significance of cleanrooms in semiconductor fabrication. These meticulously controlled environments are the silent guardians of technological progress, ensuring the integrity of the devices that shape our modern world.

Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semiconductor Manufacturing Technology, Second Edition features new and updated material that keeps it at the vanguard of today's most dynamic and rapidly growing field. Iconic experts Robert Doering and Yoshio Nishi have again assembled a team of the world's leading specialists in every area of semiconductor manufacturing to provide the most reliable, authoritative, and industry-leading information available. Stay Current with the Latest Technologies In addition to updates to nearly every existing chapter, this edition features five entirely new contributions on... Silicon-on-insulator (SOI) materials and devices Supercritical CO2 in semiconductor cleaning Low-κ dielectrics Atomic-layer deposition Damascene copper electroplating Effects of terrestrial radiation on integrated circuits (ICs) Reflecting rapid progress in many areas, several chapters were heavily revised and updated, and in some cases, rewritten to reflect rapid advances in such areas as interconnect technologies, gate dielectrics, photomask fabrication, IC packaging, and 300 mm wafer fabrication. While no book can be up-to-the-minute with the advances in the semiconductor field, the Handbook of Semiconductor Manufacturing Technology keeps the most important data, methods, tools, and techniques close at hand.

"This concise introduction to semiconductor fabrication technology covers everything professionals need to know, from crystal growth to integrated devices and circuits. Throughout, the authors address both theory and the practical aspects of each major fabrication step, including crystal growth, silicon oxidation, photolithography, etching, diffusion, ion implantation, and thin film deposition. The book integrates Computer Modeling & Simulation tools throughout. Process simulation is used as a tool for what-if analysis and discussion. Comprehensive coverage of process sequence helps readers connect individual steps into a cohesive whole."--