Electroceramic Based Mems

The book is focused on the use of functional oxide and nitride films to enlarge the application range of MEMS (microelectromechanical systems), including micro-sensors, micro-actuators, transducers, and electronic components for microwaves and optical communications systems. Applications, emerging applications, fabrication technology and functioning issues are presented and discussed. The book covers the following topics: Part A: Applications and devices with electroceramic-based MEMS: Chemical microsensors Microactuators based on thin films Micromachined ultrasonic transducers Thick-film piezoelectric and magnetostrictive devices Pyroelectric microsystems RF bulk acoustic wave resonators and filters High frequency tunable devices MEMS for optical functionality Part B: Materials, fabrication technology, and functionality: Ceramic thick films for MEMS Piezoelectric thin films for MEMS Materials and technology in thin films for tunable high frequency devices Permittivity, tunability and loss in ferroelectrics for reconfigurable high frequency electronics Microfabrication of piezoelectric MEMS Nano patterning methods for electroceramics Soft lithography emerging techniques The book is addressed to engineers, scientists and researchers of various disciplines, device engineers, materials engineers, chemists, physicists and microtechnologists who are working and/or interested in this fast growing and highly promising field. The publication of this book follows a Special Issue on electroceramic-based MEMS that was published in the Journal of Electroceramics at the beginning of 2004. The ten invited papers of that special issue were adapted by the authors into chapters of the present book and five additional chapters were added.

MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.

Today’s wireless communications and information systems are heavily based on microwave technology. Current trends indicate that in the future along with - crowaves, the millimeter wave and Terahertz technologies will be used to meet the growing bandwidth and overall performance requirements. Moreover, motivated by the needs of the society, new industry sectors are gaining ground; such as wi- less sensor networks, safety and security systems, automotive, medical, envir- mental/food monitoring, radio tags etc. Furthermore, the progress and the pr- lems in the modern society indicate that in the future these systems have to be more user/consumer friendly, i. e. adaptable, reconfigurable and cost effective. The mobile phone is a typical example which today is much more than just a phone; it includes a range of new functionalities such as Internet, GPS, TV, etc. To handle, in a cost effective way, all available and new future standards, the growing n- ber of the channels and bandwidth both the mobile handsets and the associated systems have to be agile (adaptable/reconfigurable). The complex societal needs have initiated considerable activities in the field of cognitive and software defined radios and triggered extensive research in adequate components and technology platforms. To meet the stringent requirements of these systems, especially in ag- ity and cost, new components with enhanced performances and new functionalities are needed. In this sense the components based on ferroelectrics have greater - tential and already are gaining ground.

Combining both fundamental principles and real-life applications in a single volume, this book discusses the latest research results in ferroelectrics, including many new ferroelectric materials for the latest technologies, such as capacitors, transducers and memories. The first two chapters introduce dielectrics and microscopic materials properties, while the following chapter discusses pyroelectricity and piezoelectricity. The larger part of the text is devoted to ferroelectricity and ferroelectric ceramics, with not only their fundamentals but also applications discussed. The book concludes with a look at the future for laser printed materials and applications. With over 600 references to recent publications on piezoelectric and ferroelectric materials, this is an invaluable reference for physicists, materials scientists and engineers.

The evolution of solid-state circuit technology has a long history within a relatively short period of time. This technology has lead to the modern information society that connects us and tools, a large market, and many types of products and applications. The solid-state circuit technology continuously evolves via breakthroughs and improvements every year. This book is devoted to review and present novel approaches for some of the main issues involved in this exciting and vigorous technology. The book is composed of 22 chapters, written by authors coming from 30 different institutions located in 12 different countries throughout the Americas, Asia and Europe. Thus, reflecting the wide international contribution to the book. The broad range of subjects presented in the book offers a general overview of the main issues in modern solid-state circuit technology. Furthermore, the book offers an in depth analysis on specific subjects for specialists. We believe the book is of great scientific and educational value for many readers. I am profoundly indebted to the support provided by all of those involved in the work. First and foremost I would like to acknowledge and thank the authors who worked hard and generously agreed to share their results and knowledge. Second I would like to express my gratitude to the Intech team that invited me to edit the book and give me their full support and a fruitful experience while working together to combine this book.

Whilst printed films are currently used in varied devices across a wide range of fields, research into their development and properties is increasingly uncovering even greater potential. Printed films provides comprehensive coverage of the most significant recent developments in printed films and their applications. Materials and properties of printed films are the focus of part one, beginning with a review of the concepts, technologies and materials involved in their production and use. Printed films as electrical components and silicon metallization for solar cells are discussed, as are conduction mechanisms in printed film resistors, and thick films in packaging and microelectronics. Part two goes on to review the varied applications of printed films in devices. Printed resistive sensors are considered, as is the role of printed films in capacitive, piezoelectric and pyroelectric sensors, mechanical micro-systems and gas sensors. The applications of printed films in biosensors, actuators, heater elements, varistors and polymer solar cells are then explored, followed by a review of screen printing for the fabrication of solid oxide fuel cells and laser printed micro- and meso-scale power generating devices. With its distinguished editors and international team of expert contributors, Printed films is a key text for anyone working in such fields as microelectronics, fuel cell and sensor technology in both industry and academia. Provides a comprehensive analysis of the most significant recent developments in printed films and their applications Reviews the concepts, properties, technologies and materials involved in the production and use of printed films Analyses the varied applications of printed films in devices, including printed restrictive sensors for physical quantities and printed thick film mechanical micro-systems (MEMS), among others

The problems involved in designing optimal infrared (IR) measuring systems under given conditions are commensurately complex. The optical set-up and radiation conditions, the interaction between sensor and irradiation and the sensor itself, determine the operation of the sensor system. Simple calculations for solving these problems without any understanding of the causal relationships are not possible. Thermal Infrared Sensors offers a concise explanation of the basic physical and photometric fundamentals needed for the consideration of these interactions. It depicts the basics of thermal IR sensor systems and explains the manifold causal relationships between the most important effects and influences, describing the relationships between sensor parameters such as thermal and special resolution, and application conditions. This book covers: various types of thermal sensors, like thermoelectric sensor, pyroelectric sensors, microbolometers, micro-Golay cells and bimorphous sensors; basic applications for thermal sensors; noise - a limiting factor for thermal resolution and detectivity - including an outline of the mathematics and noise sources in thermal infrared sensors; the properties of IR sensor systems in conjunction with the measurement environment and application conditions; 60 examples showing calculations of real problems with real numbers, as they occur in many practical applications. This is an essential reference for practicing design and optical engineers and users of infrared sensors and infrared cameras. With this book they will be able to transform the demonstrated solutions to their own problems, find ways to match their commercial IR sensors and cameras to their measurement conditions, and to tailor and optimise sensors and set-ups to particular IR measurement problems. The basic knowledge outlined in this book will give advanced undergraduate and graduate students a thorough grounding in this technology.

Whilst inkjet technology is well-established on home and small office desktops and is now having increasing impact in commercial printing, it can also be used to deposit materials other than ink as individual droplets at a microscopic scale. This allows metals, ceramics, polymers and biological materials (including living cells) to be patterned on to substrates under precise digital control. This approach offers huge potential advantages for manufacturing, since inkjet methods can be used to generate structures and functions which cannot be attained in other ways. Beginning with an overview of the fundamentals, this bookcovers the key components, for example piezoelectric print-heads and fluids for inkjet printing, and the processes involved. It goes on to describe specific applications, e.g. MEMS, printed circuits, active and passive electronics, biopolymers and living cells, and additive manufacturing. Detailed case studies are included on flat-panel OLED displays, RFID (radio-frequency identification) manufacturing and tissue engineering, while a comprehensive examination of the current technologies and future directions of inkjet technology completes the coverage. With contributions from both academic researchers and leading names in the industry, Inkjet Technology for Digital Fabrication is a comprehensive resource for technical development engineers, researchers and students in inkjet technology and system development, and will also appeal to researchers in chemistry, physics, engineering, materials science and electronics.