Gaseous Electronics Conference Radio Frequency Reference Cell

The GEC RF Reference Cell is a parallel plate, capacity-coupled, rf plasma reactor that, in principle, is suitable for studies of basic discharge phenomena, investigation of industrial-type plasmas, and theoretical modeling. This report contains 12 articles that review nearly all of the experiments and theoretical modeling efforts that have been performed over the last 5 years using GEC cells. Together, they serve as a "users' guide" to the operation and performance of the GEC cell.

Reports NIST research and development in the physical and engineering sciences in which the Institute is active. These include physics, chemistry, engineering, mathematics, and computer sciences. Emphasis on measurement methodology and the basic technology underlying standardization.

Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.

Technical plasmas have a wide range of industrial applications. The Encyclopedia of Plasma Technology covers all aspects of plasma technology from the fundamentals to a range of applications across a large number of industries and disciplines. Topics covered include nanotechnology, solar cell technology, biomedical and clinical applications, electronic materials, sustainability, and clean technologies. The book bridges materials science, industrial chemistry, physics, and engineering, making it a must have for researchers in industry and academia, as well as those working on application-oriented plasma technologies. Also Available Online This Taylor & Francis encyclopedia is also available through online subscription, offering a variety of extra benefits for researchers, students, and librarians, including: Citation tracking and alerts Active reference linking Saved searches and marked lists HTML and PDF format options Contact Taylor and Francis for more information or to inquire about subscription options and print/online combination packages. US: (Tel) 1.888.318.2367; (E-mail) [email protected] International: (Tel) +44 (0) 20 7017 6062; (E-mail) [email protected]

This book resulted from the NATO Advanced Research Workshop on “Electron Kinetics and Applications of Glow Discharges,” held in St. Petersburg, Russia, on May 19-23, 1997. Glow discharges have found widespread applications in many technological processes from the manufacture of semiconductors, to recent developments in na- technology, to the traditional fields of gas lasers, and discharge lamps. Consequently, the interest in the physics of glow discharges has experienced yet another resurgence of interest. While the non-equilibrium character of glow discharges is widely accepted, the opinion still prevails that the main features can be captured by fluid models, and that kinetic treatments are only required for the understanding of subtle details. The erroneousness of this belief is demonstrated by the failure of fluid models to describe many basic features of glow discharges such as, for instance, electrode phenomena, striations, and collisionless heating effects. An adequate description of glow discharges thus has to be of kinetic nature.

Plasma technologies present an environmentally-friendly and versatile way of treating textile materials in order to enhance a variety of properties such as wettability, liquid repellency, dyeability and coating adhesion. Recent advances made in commercially viable plasma systems have greatly increased the potential of using plasma technology in industrial textile finishing. This pioneering book provides an essential guide to both the technology and science related to plasmas and its practical applications in the textile industry. The first part of the book discusses the science and technology behind plasmas. Chapters give detailed and comprehensive descriptions on the characteristics of plasmas and methods of control and treatment in the processing of textiles. Both low pressure cold plasma and atmospheric pressure cold plasma processes are described as well as the diagnosis and control of plasma parameters in plasma generating reactors. A chapter is devoted to the use of plasma technology to achieve nanoscale treatment of textile surfaces. The second part of the book concentrates on specific applications of plasma technologies. Chapters cover treatments for water and oil repellency of textiles, engineering of biomedical textiles and woollen finishing techniques through the use of plasma technologies. Further chapters cover the modification of fibres for use in composites and the potential use of plasma technologies for the finishing of fabrics made of man made fibres. The final chapter in the book gives a comprehensive analysis of the surface chemical and physical characterisation of plasma treated fabrics. Written by a distinguished international team of experts, Plasma technologies for textiles is an invaluable reference for researchers, scientists and technologists alike. Summarises both the science and technology of plasma processing, and its practical applications Discusses how plasma technology improves textile properties such as wettability and liquid repelling An invaluable reference for researchers, scientists and technologists