Handbook of Physical Vapor Deposition PVD Processing

Handbook of Physical Vapor Deposition  PVD  Processing
Author: D. M. Mattox
Publsiher: Cambridge University Press
Total Pages: 947
Release: 2014-09-19
Genre: Technology & Engineering
ISBN: 9780080946580

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This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that are critical to economical deposition of films that can meet the required performance specifications. The book covers subjects seldom treated in the literature: substrate characterization, adhesion, cleaning and the processing. The book also covers the widely discussed subjects of vacuum technology and the fundamentals of individual deposition processes. However, the author uniquely relates these topics to the practical issues that arise in PVD processing, such as contamination control and film growth effects, which are also rarely discussed in the literature. In bringing these subjects together in one book, the reader can understand the interrelationship between various aspects of the film deposition processing and the resulting film properties. The author draws upon his long experience with developing PVD processes and troubleshooting the processes in the manufacturing environment, to provide useful hints for not only avoiding problems, but also for solving problems when they arise. He uses actual experiences, called ""war stories"", to emphasize certain points. Special formatting of the text allows a reader who is already knowledgeable in the subject to scan through a section and find discussions that are of particular interest. The author has tried to make the subject index as useful as possible so that the reader can rapidly go to sections of particular interest. Extensive references allow the reader to pursue subjects in greater detail if desired. The book is intended to be both an introduction for those who are new to the field and a valuable resource to those already in the field. The discussion of transferring technology between R&D and manufacturing provided in Appendix 1, will be of special interest to the manager or engineer responsible for moving a PVD product and process from R&D into production. Appendix 2 has an extensive listing of periodical publications and professional societies that relate to PVD processing. The extensive Glossary of Terms and Acronyms provided in Appendix 3 will be of particular use to students and to those not fully conversant with the terminology of PVD processing or with the English language.

Handbook of Physical Vapor Deposition PVD Processing

Handbook of Physical Vapor Deposition  PVD  Processing
Author: D. M. Mattox
Publsiher: Unknown
Total Pages: 945
Release: 1998
Genre: Physical vapor deposition
ISBN: 0815517610

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This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that are critical to economical deposition of films that can meet the required performance specifications. The book covers subjects seldom treated in the literature: substrate characterization, adhesion, cleaning and the processing. The book also covers the widely discussed subjects of vacuum te.

The Foundations of Vacuum Coating Technology

The Foundations of Vacuum Coating Technology
Author: Donald M. Mattox
Publsiher: William Andrew
Total Pages: 378
Release: 2018-08-21
Genre: Technology & Engineering
ISBN: 9780128130858

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The Foundations of Vacuum Coating Technology, Second Edition, is a revised and expanded version of the first edition, which was published in 2003. The book reviews the histories of the various vacuum coating technologies and expands on the history of the enabling technologies of vacuum technology, plasma technology, power supplies, and low-pressure plasma-enhanced chemical vapor deposition. The melding of these technologies has resulted in new processes and products that have greatly expanded the application of vacuum coatings for use in our everyday lives. The book is unique in that it makes extensive reference to the patent literature (mostly US) and how it relates to the history of vacuum coating. The book includes a Historical Timeline of Vacuum Coating Technology and a Historical Timeline of Vacuum/Plasma Technology, as well as a Glossary of Terms used in the vacuum coating and surface engineering industries. History and detailed descriptions of Vacuum Deposition Technologies Review of Enabling Technologies and their importance to current applications Extensively referenced text Patents are referenced as part of the history Historical Timelines for Vacuum Coating Technology and Vacuum/Plasma Technology Glossary of Terms for vacuum coating

Handbook of Chemical Vapor Deposition

Handbook of Chemical Vapor Deposition
Author: Hugh O. Pierson
Publsiher: William Andrew
Total Pages: 506
Release: 1999-09-01
Genre: Technology & Engineering
ISBN: 9780815517436

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Turn to this new second edition for an understanding of the latest advances in the chemical vapor deposition (CVD) process. CVD technology has recently grown at a rapid rate, and the number and scope of its applications and their impact on the market have increased considerably. The market is now estimated to be at least double that of a mere seven years ago when the first edition of this book was published. The second edition is an update with a considerably expanded and revised scope. Plasma CVD and metallo-organic CVD are two major factors in this rapid growth. Readers will find the latest data on both processes in this volume. Likewise, the book explains the growing importance of CVD in production of semiconductor and related applications.

Handbook of Thin Film Technology

Handbook of Thin Film Technology
Author: Hartmut Frey,Hamid R. Khan
Publsiher: Springer Science & Business Media
Total Pages: 380
Release: 2015-05-06
Genre: Technology & Engineering
ISBN: 9783642054303

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“Handbook of Thin Film Technology” covers all aspects of coatings preparation, characterization and applications. Different deposition techniques based on vacuum and plasma processes are presented. Methods of surface and thin film analysis including coating thickness, structural, optical, electrical, mechanical and magnetic properties of films are detailed described. The several applications of thin coatings and a special chapter focusing on nanoparticle-based films can be found in this handbook. A complete reference for students and professionals interested in the science and technology of thin films.

Handbook of Deposition Technologies for Films and Coatings

Handbook of Deposition Technologies for Films and Coatings
Author: Peter M. Martin
Publsiher: William Andrew
Total Pages: 932
Release: 2009-12-01
Genre: Technology & Engineering
ISBN: 9780815520320

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This 3e, edited by Peter M. Martin, PNNL 2005 Inventor of the Year, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. This long-awaited revision includes updated and new chapters on atomic layer deposition, cathodic arc deposition, sculpted thin films, polymer thin films and emerging technologies. Extensive material was added throughout the book, especially in the areas concerned with plasma-assisted vapor deposition processes and metallurgical coating applications.

The Foundations of Vacuum Coating Technology

The Foundations of Vacuum Coating Technology
Author: D. M. Mattox
Publsiher: Springer Science & Business Media
Total Pages: 164
Release: 2003
Genre: Science
ISBN: 3540204105

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Annotation applications of this technology. With its many references, this book provides a starting point for more in-depth surveys on what has been done as well as more recent work. The author draws comparisons and places the information in the proper context, which is particularly helpful for the patent literature where the terminology used is often not that used by the technical community. A "must" for materials scientists and engineers working with vacuum coating in the invention of new applications and researching patents, plus of special interest to those in the semiconductors field.

Oxide Dispersion Strengthened Refractory Alloys

Oxide Dispersion Strengthened Refractory Alloys
Author: Anshuman Patra
Publsiher: CRC Press
Total Pages: 198
Release: 2022-05-19
Genre: Technology & Engineering
ISBN: 9781000580556

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Refractory metals such as W, Mo, Ta, Nb, and Re have immense potential for application in plasma-facing materials in nuclear reactors, defense materials, aviation counterweights, heating elements in furnaces, and so forth. This book presents a wide perspective of oxide dispersion strengthened refractory alloys fabrication and critical properties. It provides a comprehensive road map for an appropriate basis for alloy design, process parameter selection, fabrication route, and deformation behavior for oxide dispersion strengthened refractory alloys. It further covers achievement of application-oriented properties and critical process-regulating parameters for development of sustainable materials. Features: Covers development of oxide dispersion strengthened sustainable material to withstand high-temperature environments Describes stimulating application-oriented final mechanical properties Illustrates fabrication of alloys through effective route to achieve desired properties Presents in-depth explanation of deformation behavior at ambient and high temperatures Explores critical applications of the alloys in nuclear reactors, defense, and aviation sectors Oxide Dispersion Strengthened Refractory Alloys will be of interest to graduate students and researchers in high-temperature materials, mechanics, metallurgy, powder metallurgy, and physical metallurgy.