Handbook of Silicon Based MEMS Materials and Technologies

Handbook of Silicon Based MEMS Materials and Technologies
Author: Markku Tilli,Mervi Paulasto-Krockel,Teruaki Motooka,Veikko Lindroos
Publsiher: William Andrew
Total Pages: 826
Release: 2015-09-02
Genre: Technology & Engineering
ISBN: 9780323312233

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The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, manufacturing, processing, system integration, measurement, and materials characterization techniques, sensors, and multi-scale modeling methods of MEMS structures, silicon crystals, and wafers, also covering micromachining technologies in MEMS and encapsulation of MEMS components. Furthermore, it provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques, shows how to protect devices from the environment, and provides tactics to decrease package size for a dramatic reduction in costs. Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques Shows how to protect devices from the environment and decrease package size for a dramatic reduction in packaging costs Discusses properties, preparation, and growth of silicon crystals and wafers Explains the many properties (mechanical, electrostatic, optical, etc.), manufacturing, processing, measuring (including focused beam techniques), and multiscale modeling methods of MEMS structures Geared towards practical applications rather than theory

Handbook of Silicon Based MEMS Materials and Technologies

Handbook of Silicon Based MEMS Materials and Technologies
Author: Markku Tilli,Mervi Paulasto-Kröckel,Matthias Petzold,Horst Theuss,Teruaki Motooka,Veikko Lindroos
Publsiher: Elsevier
Total Pages: 1028
Release: 2020-04-17
Genre: Technology & Engineering
ISBN: 9780128177877

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Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors

Handbook of Silicon Based MEMS Materials and Technologies

Handbook of Silicon Based MEMS Materials and Technologies
Author: Markku Tilli,Mervi Paulasto-Krockel,Veli-Matti Airaksinen,Sami Franssila,Veikko Lindroos,Ari Lehto,Teruaki Motooka
Publsiher: Elsevier
Total Pages: 668
Release: 2009-12-08
Genre: Technology & Engineering
ISBN: 0815519885

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A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: Silicon as MEMS material Material properties and measurement techniques Analytical methods used in materials characterization Modeling in MEMS Measuring MEMS Micromachining technologies in MEMS Encapsulation of MEMS components Emerging process technologies, including ALD and porous silicon Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling the needs of device design engineers and process or development engineers working in manufacturing processes. It also provides a comprehensive reference for the industrial R&D and academic communities. Veikko Lindroos is Professor of Physical Metallurgy and Materials Science at Helsinki University of Technology, Finland. Markku Tilli is Senior Vice President of Research at Okmetic, Vantaa, Finland. Ari Lehto is Professor of Silicon Technology at Helsinki University of Technology, Finland. Teruaki Motooka is Professor at the Department of Materials Science and Engineering, Kyushu University, Japan. Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques Shows how to protect devices from the environment and decrease package size for dramatic reduction of packaging costs Discusses properties, preparation, and growth of silicon crystals and wafers Explains the many properties (mechanical, electrostatic, optical, etc), manufacturing, processing, measuring (incl. focused beam techniques), and multiscale modeling methods of MEMS structures

MEMS Materials and Processes Handbook

MEMS Materials and Processes Handbook
Author: Reza Ghodssi,Pinyen Lin
Publsiher: Springer Science & Business Media
Total Pages: 1211
Release: 2011-03-18
Genre: Technology & Engineering
ISBN: 9780387473185

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MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.

Developments in Surface Contamination and Cleaning Methods for Surface Cleaning

Developments in Surface Contamination and Cleaning  Methods for Surface Cleaning
Author: Rajiv Kohli,Kashmiri L. Mittal
Publsiher: William Andrew
Total Pages: 212
Release: 2016-11-04
Genre: Technology & Engineering
ISBN: 9780323431729

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Developments in Surface Contamination and Cleaning: Methods for Surface Cleaning, Volume 9, part of the Developments in Surface Contamination and Cleaning series provide a state-of-the-art guide to the current knowledge on the behavior of film-type and particulate surface contaminants and their associated cleaning methods. This newest volume in the series discusses methods of surface cleaning of contaminants and the resources that are needed to deal with them. Taken as a whole, the series forms a unique reference for professionals and academics working in the area of surface contamination and cleaning. A strong theme running through the series is that of surface contamination and cleaning at the micro and nano scales. Provides a comprehensive coverage of innovations in surface cleaning Written by established experts in the surface cleaning field, presenting an authoritative resource Contains a comprehensive review of the state-of-the-art, including case studies to enhance the learning process

Non wettable Surfaces

Non wettable Surfaces
Author: Robin H A Ras,Abraham Marmur
Publsiher: Royal Society of Chemistry
Total Pages: 391
Release: 2016-11-21
Genre: Science
ISBN: 9781782623953

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The objective of this book is to integrate information about the theory, preparation and applications of non-wettable surfaces in one volume. By combining the discussion of all three aspects together the editors will show how theory assists the development of preparations methods and how these surfaces can be applied to different situations. The book is separated into three sections, first covering the theory, then going on to preparation of these surfaces and finally discussing the applications in detail. Edited by two of the most innovative contributors to the field of superhydrophobicity, this book will be essential reading for materials scientists interested in any aspect of surface, colloid and polymer science, thermodynamics, superhydrophobic and superhygrophobic surfaces.

Flexible Sensors for Energy Harvesting Applications

Flexible Sensors for Energy Harvesting Applications
Author: Anindya Nag,Subhas Chandra Mukhopadhyay
Publsiher: Springer Nature
Total Pages: 244
Release: 2022-04-21
Genre: Technology & Engineering
ISBN: 9783030996000

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This book investigates the fabrication of different types of flexible sensors and their subsequent implementation for energy-harvesting applications. A range of techniques, including 3D printing, soft lithography, laser ablation, micro-contract printing, screen-printing, inkjet printing and others have been used to form the flexible sensors with varied characteristics. These sensors have been used for biomedical, environmental and healthcare applications on the basis of their performances. The quality of these flexible sensors has depended on certain types of nanomaterials that have been used to synthesize the conductive parts of the prototypes. These nanomaterials have been based on different sizes and shapes, whose quality varied on the basis of certain factors like crystallinity, shapes and sizes. One of the primary utilization of these nanotechnology-based flexible sensors has been the harvesting of energy where nano-generators and nano-harvesters have been formed to generate and store energy, respectively, on small and moderate magnitudes. Mechanical and thermal energies have been harvested on the basis of the piezoelectric, pyroelectric and triboelectric effects created by the formed prototypes. The work highlights the amalgamation of these sectors to spotlight the essence of these types of sensors and their intended application.

Polymers in Organic Electronics

Polymers in Organic Electronics
Author: Sulaiman Khalifeh
Publsiher: Elsevier
Total Pages: 617
Release: 2020-04-01
Genre: Technology & Engineering
ISBN: 9781927885680

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Polymers in Organic Electronics: Polymer Selection for Electronic, Mechatronic, and Optoelectronic Systems provides readers with vital data, guidelines, and techniques for optimally designing organic electronic systems using novel polymers. The book classifies polymer families, types, complexes, composites, nanocomposites, compounds, and small molecules while also providing an introduction to the fundamental principles of polymers and electronics. Features information on concepts and optimized types of electronics and a classification system of electronic polymers, including piezoelectric and pyroelectric, optoelectronic, mechatronic, organic electronic complexes, and more. The book is designed to help readers select the optimized material for structuring their organic electronic system.Chapters discuss the most common properties of electronic polymers, methods of optimization, and polymeric-structured printed circuit boards. The polymeric structures of optoelectronics and photonics are covered and the book concludes with a chapter emphasizing the importance of polymeric structures for packaging of electronic devices. Provides key identifying details on a range of polymers, micro-polymers, nano-polymers, resins, hydrocarbons, and oligomers Covers the most common electrical, electronic, and optical properties of electronic polymers Describes the underlying theories on the mechanics of polymer conductivity Discusses polymeric structured printed circuit boards, including their rapid prototyping and optimizing their polymeric structures Shows optimization methods for both polymeric structures of organic active electronic components and organic passive electronic components