Nanopositioning Technologies

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.

Covering the complete design cycle of nanopositioning systems, this is the first comprehensive text on the topic. The book first introduces concepts associated with nanopositioning stages and outlines their application in such tasks as scanning probe microscopy, nanofabrication, data storage, cell surgery and precision optics. Piezoelectric transducers, employed ubiquitously in nanopositioning applications are then discussed in detail including practical considerations and constraints on transducer response. The reader is then given an overview of the types of nanopositioner before the text turns to the in-depth coverage of mechanical design including flexures, materials, manufacturing techniques, and electronics. This process is illustrated by the example of a high-speed serial-kinematic nanopositioner. Position sensors are then catalogued and described and the text then focuses on control. Several forms of control are treated: shunt control, feedback control, force feedback control and feedforward control (including an appreciation of iterative learning control). Performance issues are given importance as are problems limiting that performance such as hysteresis and noise which arise in the treatment of control and are then given chapter-length attention in their own right. The reader also learns about cost functions and other issues involved in command shaping, charge drives and electrical considerations. All concepts are demonstrated experimentally including by direct application to atomic force microscope imaging. Design, Modeling and Control of Nanopositioning Systems will be of interest to researchers in mechatronics generally and in control applied to atomic force microscopy and other nanopositioning applications. Microscope developers and mechanical designers of nanopositioning devices will find the text essential reading.

This book comprises a selection of the presentations made at the “Workshop on Dynamics and Control of Micro and Nanoscale Systems” held at IBM Research – Zurich, Switzerland, on the 10th and 11th of December 2009. The aim of the workshop was to bring together some of the leading researchers in the field of dynamics and control of micro- and nanoscale systems. It proved an excellent forum for discussing new ideas and approaches.

This text sets out to: define and clarify terms used in specifying nanoprecision mechanisms (accuracy, precision, linearity); provide a guide to the servocontrol systems used in the authors' products; and give a general description of technologies involved in measuring and moving small distances.

This book brings together 106 papers presented at the Joint Conferences of 2015 International Conference on Computer Science and Engineering Technology (CSET2015) and 2015 International Conference on Medical Science and Biological Engineering (MSBE2015), which were held in Hong Kong on 30-31 May 2015.The joint conferences covered a wide range of research topics in new emerging technologies, ranging from computing to biomedical engineering. During the conferences, industry professionals, scholars and government agencies around the world gathered to share their latest research results and discuss the practical challenges they encountered. Their research articles were reviewed and selected by a panel of experts before being compiled into this proceedings. Combining research findings and industry applications, this proceedings should be a useful reference for researchers and engineers working in computing and biomedical science.

This book brings together 106 papers presented at the Joint Conferences of 2015 International Conference on Computer Science and Engineering Technology (CSET2015) and 2015 International Conference on Medical Science and Biological Engineering (MSBE2015), which were held in Hong Kong on 30–31 May 2015. The joint conferences covered a wide range of research topics in new emerging technologies, ranging from computing to biomedical engineering. During the conferences, industry professionals, scholars and government agencies around the world gathered to share their latest research results and discuss the practical challenges they encountered. Their research articles were reviewed and selected by a panel of experts before being compiled into this proceedings. Combining research findings and industry applications, this proceedings should be a useful reference for researchers and engineers working in computing and biomedical science. Contents: Mechanical and Control EngineeringComputer Science and Its ApplicationMedical Science and Biological EngineeringTechnology for EducationBuilding Material and Civil EngineeringMaterial Science and Engineering Readership: Researchers interested in computer science and biomedical science, as well as graduate students working on related technologies. Keywords:Computer Engineering;Mechanical Engineering;Medical Science;Computer Aided Instruction