Piezo Driven Stages For Nanopositioning With Extreme Stability

Drives and Control for Industrial Automation presents the material necessary for an understanding of servo control in automation. Beginning with a macroscopic view of its subject, treating drives and control as parts of a single system, the book then pursues a detailed discussion of the major components of servo control: sensors, controllers and actuators. Throughout, the mechatronic approach – a synergistic integration of the components – is maintained, in keeping with current practice. The authors’ holistic approach does not preclude the reader from learning in a step-by-step fashion – each chapter contains material that can be studied separately without compromising understanding. Drives are described in several chapters according to the way they are usually classified in industry, each comprised of its actuators and sensors. The controller is discussed alongside. Topics of recent and current interest – piezoelectricity, digital communications and future trends – are detailed in their own chapters.

While ultra-precision machines are now achieving sub-nanometer accuracy, unique challenges continue to arise due to their tight specifications. Written to meet the growing needs of mechanical engineers and other professionals to understand these specialized design process issues, Introduction to Precision Machine Design and Error Assessment places

Modeling and Control of Precision Actuators explores new technologies that can ultimately be applied in a myriad of industries. It covers dynamical analysis of precise actuators and strategies of design for various control applications. The book addresses four main schemes: modeling and control of precise actuators; nonlinear control of precise actuators, including sliding mode control and neural network feedback control; fault detection and fault-tolerant control; and advanced air bearing control. It covers application issues in the modeling and control of precise actuators, providing several interesting case studies for more application-oriented readers. Introduces the driving forces behind precise actuators Describes nonlinear dynamics of precise actuators and their mathematical forms, including hysteresis, creep, friction, and force ripples Presents the control strategies for precise actuators based on Preisach model as well as creep dynamics Develops relay feedback techniques for identifying nonlinearities such as friction and force ripples Discusses a MPC approach based on piecewise affine models which emulate the frictional effects in the precise actuator Covers the concepts of air bearing stages with the corresponding control method Provides a set of schemes suitable for fault detection and accommodation control of mechanical systems Emphasizing design theory and control strategies, the book includes simulation and practical examples for each chapter; covers precise actuators such as piezo motors, coil motors, air bearing motors, and linear motors; discusses integration among different technologies; and includes three case studies in real projects. The book concludes by linking design methods and their applications, emphasizing the key issues involved and how to implement the precision motion control tasks in a practical system. It provides a concise and comprehensive source of the state-of-the-art developments and results for modeling and control of precise actuators.

An Up-To-Date Reference on the Latest Developments of MechatronicsGeared toward engineers, designers, researchers, educators, and students, Mechatronics: Fundamentals and Applications focuses on integrating practice with theory relevant to electromechanical and multidomain systems. A result of the Distinguished Visiting Fellowship of the Royal Acad

Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

High performance nanopositioning stages, used in a variety of applications such as atomic force microscopy and three-dimensional nanometer-scale lithography, require stringent position control over relatively large displacements and a broad frequency range. Piezoelectric materials, which are typically employed in nanopositioning stages, provide excellent position control when driven at relatively low frequency and low field levels. However, in applications where the stage operates over a relatively large region (microns to millimeters) and broad frequency range (Hz - kHz), piezoelectric materials often exhibit nonlinear and rate-dependent hystereis which require control designs that can effectively accommodate such behavior. In this paper, a nonlinear, thermal-relaxation, piezoelectric constitutive law is incorporated into an open loop optimal tracking control design to accurately track a desired reference signal when nonlinearities, thermal relaxation and hysteresis are present. A comparison between linear optimal control and the nonlinear optimal control design is given to illustrate performance enhancements when the constitutive behavior is included in the control design.