Proceedings Of The Symposia On Electrochemical Processing In Ulsi Fabrication I
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Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I
Author | : Electrochemical Society. Dielectric Science and Technology Division,Electrochemical Society. Electrodeposition Division,Electrochemical Society. Meeting |
Publsiher | : Unknown |
Total Pages | : 290 |
Release | : 1999 |
Genre | : Science |
ISBN | : UOM:39015057617741 |
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Electrochemical Processing in ULSI Fabrication and Semiconductor metal Deposition II
Author | : Panayotis C. Andricacos,Electrochemical Society. Dielectric Science and Technology Division,Electrochemical Society. Electronics Division |
Publsiher | : The Electrochemical Society |
Total Pages | : 418 |
Release | : 1999 |
Genre | : Science |
ISBN | : 1566772311 |
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Electrochemical Processing in ULSI Fabrication III
Author | : Panayotis C. Andricacos,Electrochemical Society. Electrodeposition Division,Electrochemical Society. Dielectric Science and Technology Division,Electrochemical Society. Electronics Division |
Publsiher | : The Electrochemical Society |
Total Pages | : 262 |
Release | : 2002 |
Genre | : Computers |
ISBN | : 1566772737 |
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"Held May 2000 in Toronto, Canada, as part of the 197th meeting of the Electrochemical Society."--Pref.
Morphological Evolution of Electrodeposits and Electrochemical Processing in ULSI Fabrication and Electrodeposition of and on Semiconductors IV
Author | : Kazuo Kondo |
Publsiher | : The Electrochemical Society |
Total Pages | : 422 |
Release | : 2005 |
Genre | : Copper plating |
ISBN | : 9182736450XXX |
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Papers in this volume are from the 199th ECS Meeting, held in Washington, DC, Spring 2001. Morphology evolution encompasses electrochemical processing in ULSI fabrication, shape evolution, growth habit, and microstructure of electrodeposits. The most prominent example at present is the electrochemical deposition of copper for ULSI interconnects. Many other electrochemical processes at various stages of emergence and development hold promise for the electronics industry and beyond.
ULSI Process Integration III
Author | : Electrochemical Society. Meeting |
Publsiher | : The Electrochemical Society |
Total Pages | : 620 |
Release | : 2003 |
Genre | : Technology & Engineering |
ISBN | : 1566773768 |
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ULSI Process Integration II
Author | : Cor L. Claeys,Electrochemical Society. Meeting |
Publsiher | : The Electrochemical Society |
Total Pages | : 636 |
Release | : 2001 |
Genre | : Technology & Engineering |
ISBN | : 1566773083 |
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Interconnect and Contact Metallization for ULSI
Author | : G. S. Mathad,Hamir Singh Rathore,Y. Arita |
Publsiher | : The Electrochemical Society |
Total Pages | : 358 |
Release | : 2000 |
Genre | : Science |
ISBN | : 1566772540 |
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Electrochemical Processing in ULSI and MEMS 3
Author | : John O. Dukovic |
Publsiher | : The Electrochemical Society |
Total Pages | : 288 |
Release | : 2007-09 |
Genre | : Science |
ISBN | : 9781566775861 |
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The papers in this issue describe the latest advances in fundamental and practical aspects of electrochemical processes for fabrication of microelectronic devices and related structures. Topics range from plating to etching, chips to packages, mechanisms to models, through-silicon vias to nanotubes, tin to ruthenium, capping to cooling, porous gold to porous alumina, probe-card springs to solder balls, electroless deposition to CMP, TFT-LCDs to magnetic nanowires and beyond.