Quantitative Electron Probe Microanalysis

In 1968, the National Bureau of Standards (NBS) published Special Publication 298 "Quantitative Electron Probe Microanalysis," which contained proceedings of a seminar held on the subject at NBS in the summer of 1967. This publication received wide interest that continued through the years far beyond expectations. The present volume, also the result of a gathering of international experts, in 1988, at NBS (now the National Institute of Standards and Technology, NIST), is intended to fulfill the same purpose. After years of substantial agreement on the procedures of analysis and data evaluation, several sharply differentiated approaches have developed. These are described in this publi cation with all the details required for practical application. Neither the editors nor NIST wish to endorse any single approach. Rather, we hope that their exposition will stimulate the dialogue which is a prerequisite for technical progress. Additionally, it is expected that those active in research in electron probe microanalysis will appreciate more clearly the areas in which further investigations are warranted.

Electron Probe Microanalysis presents a collection of reviews on various aspects of electron probe microanalysis. This book discusses the model for quantitative electron probe analysis. Organized into 14 chapters, this book begins with an overview of the various kinds of microanalysis followed by a discussion of the advantages that can be derived from using the electron probe method. This text then examines the various applications of backscattered electron and specimen current methods for quantitative analysis. Other chapters consider the fundamental concepts for quantitative electron probe microanalysis utilizing pure elements as standards. This book discusses as well the absolute method of quantitative chemical analysis by emission X-ray spectroscopy. The final chapter deals with the main advantage of the Kossel technique in the study of the thermodynamic and mechanical characteristics of crystals. This book is a valuable resource for scientists and research workers. Non-specialists who need information on this excellent analytical tool will also find this book useful.

Although the foundations for a procedure of data reduction in quantitative electron probe analysis have not been changed for several years, there has been progress in the choice of expressions, parameters, and constants. A brief account of recommended expressions and procedures is given. Reference is made to the Standard Reference Materials of Au-Ag and Au-Cu alloys issued for electron probe microanalysis.These are especially useful for investigating the application of correction procedures.