Chemical Mechanical Planarization Volume 867

Technology requirements associated with the progressive scaling of devices for future technology nodes, coupled with the aggressive introduction of new materials, places tremendous demands on chemical-mechanical polishing. The goal of this 2005 book, which is part of a popular series from MRS, is to bring together experts from a broad spectrum of research and technology groups currently working on CMP, to review advances made, and to offer a comprehensive discussion of future challenges that must be overcome. The book shows trends in the development of consumables, process modules, tool designs, process integration, modeling, defect characterization, and metrology. Topics include: planarization processes and applications; consumables -CMP pads and slurries; CMP equipment and metrology; and CMP modeling and simulation.

Chemical-mechanical planarization (CMP) has emerged as a critical fabrication technology for advanced integrated circuits. Even as the applications of CMP have diversified and we have begun to understand aspects of the physics and chemistry of the process, a new generation of CMP innovations is unfolding. New slurries and consumables are under development. New applications to novel devices continue to appear. This book, the most recent in a successful series on CMP, offers a review of the advances to date and provides a comprehensive discussion of the future challenges that must be overcome. Presentations from academia, government labs and industry are featured. Topics include; CMP modeling; CMP science; CMP slurries and particles for planarization of copper, oxide, and other materials; planarization applications including shallow trench isolation (STI), copper damascene, and novel devices and CMP integration.

The symposium provided a forum for reviewing and discussing all aspects of process integration, with special focus on nanoscaled technologies, 65 nm and beyond on DRAM, SRAM, flash memory, high density logic-low power, RF, mixed analog-digital, process integration yield, CMP chemistries, low-k processes, gate stacks, metal gates, rapid thermal processing, silicides, copper interconnects, carbon nanotubes, novel materials, high mobility substrates (SOI, sSi, SiGe, GeOI), strain engineering, and hybrid integration.

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. This book studies the effect of nanometer-scale structure and confinement on degradation processes and analyzes the experimental and theoretical approaches used to estimate the lifetime of nanostructured and nanoconfined materials in various environments.

Surface interactions and modifications have become increasingly critical for a broad range of manufacturing technologies. Applications can be in traditional manufacturing sectors and in manufacturing processes for microelectronics, optics, and micro-/nanoelectromechanical systems (MEMS/NEMS). Many applications demand engineered surfaces at different length scales that will function under extreme conditions. The goal of this book is to advance understanding of these diverse applications. In the field of tribological coatings, the increasing sophistication of coating processes to provide control over materials and composition gradients is being exploited to tailor properties such as adhesion, stresses, thermal barrier and wear resistance. Understanding the influence of nanostructure in coatings has become pivotal in the development of hard and wear-resistant materials. Modeling and simulation continue to make contributions to the understanding and predication of surface properties and surface interactions. Advances in this field have focused on the microstructure and organization of organic thin films. In tribology, the combination of modeling, with experimental probe techniques, is increasing our understanding of erosion and wear mechanisms.

Smart/intelligent systems is a primary technology for present and future applications in areas ranging from everyday life to aerospace missions, from civil to military environments, from robots to information technology. Smart materials are the critical foundation for high-performance smart devices, and smart devices are fundamental components for smart systems. The three cannot be separated. This book bridges the fields of smart materials, sensing and actuating devices, and intelligent systems, and provides an opportunity for researchers from all three arenas to channel information into a coherent, interdisciplinary community. Topics include: piezoelectric actuators; novel devices and systems; shape memory alloys and magnetostrictive devices; nanometer-scale processing and properties; piezoelectric materials; sensor materials and devices; and electroactive polymer actuators.