Ulsi Process Integration 5
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ULSI Process Integration 5
Author | : Cor L. Claeys |
Publsiher | : The Electrochemical Society |
Total Pages | : 509 |
Release | : 2007 |
Genre | : Integrated circuits |
ISBN | : 9781566775724 |
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The symposium provided a forum for reviewing and discussing all aspects of process integration, with special focus on nanoscaled technologies, 65 nm and beyond on DRAM, SRAM, flash memory, high density logic-low power, RF, mixed analog-digital, process integration yield, CMP chemistries, low-k processes, gate stacks, metal gates, rapid thermal processing, silicides, copper interconnects, carbon nanotubes, novel materials, high mobility substrates (SOI, sSi, SiGe, GeOI), strain engineering, and hybrid integration.
ULSI Process Integration 6
Author | : C. Claeys |
Publsiher | : The Electrochemical Society |
Total Pages | : 547 |
Release | : 2009-09 |
Genre | : Integrated circuits |
ISBN | : 9781566777445 |
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ULSI Process Integration 6 covers all aspects of process integration. Sections are devoted to 1) Device Technologies, 2) Front-end-of-line integration (gate stacks, shallow junctions, dry etching, etc.), 3) Back-end-of-line integration (CMP, low-k, Cu interconnect, air-gaps, 3D packaging, etc.), 4) Alternative channel technologies (Ge, III-V, hybrid integration), and 5) Emerging technologies (CNT, graphene, polymer electronics, nanotubes).
ULSI Process Integration 7
Author | : C. Claeys,H. Iwai,M. Tao,S. Deleonibus,J. Murota |
Publsiher | : The Electrochemical Society |
Total Pages | : 429 |
Release | : 2011 |
Genre | : Electronic Book |
ISBN | : 9781607682615 |
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ULSI Process Integration 9
Author | : C. Claeys,J. Murota,M. Tao,H. Iwai,S. Deleonibus |
Publsiher | : The Electrochemical Society |
Total Pages | : 335 |
Release | : 2015 |
Genre | : Electronic Book |
ISBN | : 9781607686750 |
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ULSI Process Integration III
Author | : Electrochemical Society. Meeting |
Publsiher | : The Electrochemical Society |
Total Pages | : 620 |
Release | : 2003 |
Genre | : Technology & Engineering |
ISBN | : 1566773768 |
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ULSI Process Integration II
Author | : Cor L. Claeys,Electrochemical Society. Meeting |
Publsiher | : The Electrochemical Society |
Total Pages | : 636 |
Release | : 2001 |
Genre | : Integrated circuits |
ISBN | : 1566773083 |
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ULSI Process Integration
Author | : Cor L. Claeys |
Publsiher | : The Electrochemical Society |
Total Pages | : 408 |
Release | : 1999 |
Genre | : Integrated circuits |
ISBN | : 1566772419 |
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Semiconductor Process Integration 10
Author | : J. Murota,C. L. Claeys,H. Iwai,M. Tao,S. Deleonibus,A. Mai,K. Shiojima,P. Chin |
Publsiher | : The Electrochemical Society |
Total Pages | : 325 |
Release | : 2024 |
Genre | : Electronic Book |
ISBN | : 9781607688211 |
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