Ceramic Thick Films For Mems And Microdevices

The MEMS (Micro Electro-Mechanical Systems) market returned to growth in 2010. The total MEMS market is worth about $6.5 billion, up more than 11 percent from last year and nearly as high as its historic peak in 2007. MEMS devices are used across sectors as diverse as automotive, aerospace, medical, industrial process control, instrumentation and telecommunications - forming the nerve center of products including airbag crash sensors, pressure sensors, biosensors and ink jet printer heads. Part of the MEMS cluster within the Micro & Nano Technologies Series, this book covers the fabrication techniques and applications of thick film piezoelectric micro electromechanical systems (MEMS). It includes examples of applications where the piezoelectric thick films have been used, illustrating how the fabrication process relates to the properties and performance of the resulting device. Other topics include: top-down and bottom-up fabrication of thick film MEMS, integration of thick films with other materials, effect of microstructure on properties, device performance, etc. Provides detailed guidance on the fabrication techniques and applications of thick film MEMS, for engineers and R&D groups Written by a single author, this book provides a clear, coherently written guide to this important emerging technology Covers materials, fabrication and applications in one book

Surface-Functionalized Ceramics Focused coverage of making and using functional ceramic materials for a wide variety of scientific and technical applications Surface-Functionalized Ceramics provides a comprehensive overview of surface functionalization approaches for ceramic materials, including alumina, zirconia, titania, and silica, and their uses as sensors, chemical, and biological probes, chromatographic supports for (bio)molecule purification and analysis, and adsorbents for toxic substances and pollutants. Overall, the text provides a broad picture of the enormous possibilities offered by surface functionalization and addresses the current challenges regarding surface analysis, characterization, and stability. As a well-rounded resource, the text points out opportunities of surface-functionalized ceramics, their issues such as achieving surface stability and complex analysis, and how to counter them. Edited by two experts in the field of advanced materials surfaces, Surface-Functionalized Ceramics covers topics such as: Processing methods for advanced ceramics, surface modification of ceramic materials, and methods for electrokinetic surface characteristics Surface imaging and chemical surface analysis using atomic force microscopy Surface chemical analysis and ceramic-enhanced analytics Biological and living matter-surface interactions including protein adsorption mechanisms as well as bacteria behavior in terms of biofilm formation and prevention for antibacterial applications Mesoporous silica and organosilica biosensors for water quality and environmental monitoring, plus ceramic-based adsorbents in bioproduct recovery and purification For professionals, researchers, and academics in the fields of materials science, biotechnology, biotechnological industry, environmental sciences, and ceramics industry, Surface-Functionalized Ceramics is a one-stop reference on the subject that provides different approaches to obtain surfaces of ceramic materials that perform desired functions.

The Electrocaloric Effect: Materials and Applications reviews the fundamentals of the electrocaloric effect, the most relevant electrocaloric materials, and electrocaloric measurements and device applications. The book introduces the electrocaloric effect, along with modeling and simulations of this effect. Then, it addresses the latest advances in synthesis, characterization and optimization of the most relevant electrocaloric materials, including ferroelectric materials, liquid materials, lead-free materials, polymers and composites. Finally, there is a review of the latest techniques in measurement and applications in refrigeration and cooling and a discussion of the advantages, challenges and perspectives of the future of electrocaloric refrigeration. Provides a comprehensive introduction to the electrocaloric effect including experimental techniques to measure, model, and simulate the effect Reviews the most relevant electrocaloric materials such as composites, polymers, metal oxides, ferroelectric materials, and more Touches on the design and application of electrocaloric materials for devices with potential cooling and refrigeration applications

The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, manufacturing, processing, system integration, measurement, and materials characterization techniques, sensors, and multi-scale modeling methods of MEMS structures, silicon crystals, and wafers, also covering micromachining technologies in MEMS and encapsulation of MEMS components. Furthermore, it provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques, shows how to protect devices from the environment, and provides tactics to decrease package size for a dramatic reduction in costs. Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques Shows how to protect devices from the environment and decrease package size for a dramatic reduction in packaging costs Discusses properties, preparation, and growth of silicon crystals and wafers Explains the many properties (mechanical, electrostatic, optical, etc.), manufacturing, processing, measuring (including focused beam techniques), and multiscale modeling methods of MEMS structures Geared towards practical applications rather than theory

Magnetic, Ferroelectric, and Multiferroic Metal Oxides covers the fundamental and theoretical aspects of ferroics and magnetoelectrics, their properties, and important technological applications, serving as the most comprehensive, up-to-date reference on the subject. Organized in four parts, Dr. Biljana Stojanovic leads expert contributors in providing the context to understand the material (Part I: Introduction), the theoretical and practical aspects of ferroelectrics (Part II: Ferroelectrics: From Theory, Structure and Preparation to Application), magnetic metal oxides (Part III: Magnetic Oxides: Ferromagnetics, Antiferromagnetics and Ferrimagnetics), multiferroics (Part IV: Multiferroic Metal Oxides) and future directions in research and application (Part V: Future of Metal Oxide Ferroics and Multiferroics). As ferroelectric materials are used to make capacitors with high dielectric constant, transducers, and actuators, and in sensors, reed heads, and memories based on giant magnetoresistive effects, this book will provide an ideal source for the most updated information. Addresses ferroelectrics, ferromagnetics and multiferroelectrics, providing a one-stop reference for researchers Provides fundamental theory and relevant, important technological applications Highlights their use in capacitors with high dielectric constant, transducers, and actuators, and in sensors, reed heads, and memories based on giant magnetoresistive effects

The book is focused on the use of functional oxide and nitride films to enlarge the application range of MEMS (microelectromechanical systems), including micro-sensors, micro-actuators, transducers, and electronic components for microwaves and optical communications systems. Applications, emerging applications, fabrication technology and functioning issues are presented and discussed. The book covers the following topics: Part A: Applications and devices with electroceramic-based MEMS: Chemical microsensors Microactuators based on thin films Micromachined ultrasonic transducers Thick-film piezoelectric and magnetostrictive devices Pyroelectric microsystems RF bulk acoustic wave resonators and filters High frequency tunable devices MEMS for optical functionality Part B: Materials, fabrication technology, and functionality: Ceramic thick films for MEMS Piezoelectric thin films for MEMS Materials and technology in thin films for tunable high frequency devices Permittivity, tunability and loss in ferroelectrics for reconfigurable high frequency electronics Microfabrication of piezoelectric MEMS Nano patterning methods for electroceramics Soft lithography emerging techniques The book is addressed to engineers, scientists and researchers of various disciplines, device engineers, materials engineers, chemists, physicists and microtechnologists who are working and/or interested in this fast growing and highly promising field. The publication of this book follows a Special Issue on electroceramic-based MEMS that was published in the Journal of Electroceramics at the beginning of 2004. The ten invited papers of that special issue were adapted by the authors into chapters of the present book and five additional chapters were added.

The book provides a comprehensive overview of the synthesis, characterization and potential applications of nanobiomaterials. Emphasis is placed on antimicrobial action, bone regeneration, wound treatment, cancer diagnosis, environmental cleanup and the ethical considerations of nanomedicine. Keywords: Nanomaterials, Green Chemistry, Synthesis of Nanoparticles, Characterization of Silver Nanoparticles, Antimicrobial Action, Bone Regeneration, Wound Treatment, Molecular Targets, Cancer Diagnosis, Environmental Clean-up, Ethics of Nanomedicine.

Biomedical Applications of Microfluidic Devices introduces the subject of microfluidics and covers the basic principles of design and synthesis of actual microchannels. The book then explores how the devices are coupled to signal read-outs and calibrated, including applications of microfluidics in areas such as tissue engineering, organ-on-a-chip devices, pathogen identification, and drug/gene delivery. This book covers high-impact fields (microarrays, organ-on-a-chip, pathogen detection, cancer research, drug delivery systems, gene delivery, and tissue engineering) and shows how microfluidics is playing a key role in these areas, which are big drivers in biomedical engineering research. This book addresses the fundamental concepts and fabrication methods of microfluidic systems for those who want to start working in the area or who want to learn about the latest advances being made. The subjects covered are also an asset to companies working in this field that need to understand the current state-of-the-art. The book is ideal for courses on microfluidics, biosensors, drug targeting, and BioMEMs, and as a reference for PhD students. The book covers the emerging and most promising areas of biomedical applications of microfluidic devices in a single place and offers a vision of the future. Covers basic principles and design of microfluidics devices Explores biomedical applications to areas such as tissue engineering, organ-on-a-chip, pathogen identification, and drug and gene delivery Includes chemical applications in organic and inorganic chemistry Serves as an ideal text for courses on microfluidics, biosensors, drug targeting, and BioMEMs, as well as a reference for PhD students